Invention Grant
- Patent Title: Display device manufacturing apparatus and method
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Application No.: US16173950Application Date: 2018-10-29
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Publication No.: US10796933B2Publication Date: 2020-10-06
- Inventor: Haeyoung Yoo , Taejong Kim , Juhee Lee , Myungsoo Huh , Jaekyu Park , Hyunwoo Joo
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR
- Agency: Innovation Counsel LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@6a4c4fe7
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01J37/32 ; H01L27/12 ; H01L21/311 ; H01L21/027 ; H01L27/32

Abstract:
Provided is a display device manufacturing apparatus and a manufacturing method of a display device. The display device manufacturing apparatus includes: a chamber; a supporter arranged in the chamber and supporting a substrate; an electrode arranged in the chamber so as to face the supporter; a gas supply arranged in the chamber and configured to supply process gas into the chamber; a first baffle arranged at a rim of the supporter and having at least one first through hole; and a second baffle arranged between the first baffle and the chamber and covering the at least one first through hole in a plan view to alter a path of by-products discharged from the chamber.
Public/Granted literature
- US20190341277A1 DISPLAY DEVICE MANUFACTURING APPARATUS AND METHOD Public/Granted day:2019-11-07
Information query
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