Invention Grant
- Patent Title: Magnetoresistive device and method of fabricating same
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Application No.: US15904189Application Date: 2018-02-23
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Publication No.: US10797224B2Publication Date: 2020-10-06
- Inventor: Praveen Raghavan , Davide Francesco Crotti , Raf Appeltans
- Applicant: IMEC VZW , Katholieke Universiteit Leuven
- Applicant Address: BE Leuven BE Lueven
- Assignee: IMEC vzw,Katholieke Universiteit Leuven
- Current Assignee: IMEC vzw,Katholieke Universiteit Leuven
- Current Assignee Address: BE Leuven BE Lueven
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@322639f7
- Main IPC: H01L27/22
- IPC: H01L27/22 ; H01L43/02 ; G11C5/06 ; G11C11/16 ; H01L43/12

Abstract:
The disclosed technology generally relates to magnetoresistive devices, and more particularly to a magnetic tunnel junction (MTJ) device formed in an interconnection structure, and to a method of integrating the (MTJ) device in the interconnection structure. According to an aspect, a device includes a first interconnection level including a first dielectric layer and a first set of conductive paths arranged in the first dielectric layer, a second interconnection level arranged on the first connection level and including a second dielectric layer and a second set of conductive paths arranged in the second dielectric layer, and a third interconnection level arranged on the second interconnection level and including a third dielectric layer and a third set of conductive paths arranged in the third dielectric layer. The device additionally includes a magnetic tunnel junction (MTJ) device including a bottom layer, a top layer and an MTJ structure arranged between the bottom layer and the top layer, wherein the bottom layer is connected to a bottom layer contact portion of the first set of conductive paths and the top layer is connected to a top layer contact portion of the second or third set of conductive paths. The device further includes a multi-level via extending through the second dielectric layer and the third dielectric layer, between a first via contact portion of the first set of conductive paths and a second via contact portion of the third set of conductive paths, wherein a height of the MTJ device corresponds to, or-is less than, a height of the multi-level via, e.g., wherein the height of the MTJ device corresponds to or is less than a height of the second interconnection level.
Public/Granted literature
- US20180248111A1 MAGNETORESISTIVE DEVICE AND METHOD OF FABRICATING SAME Public/Granted day:2018-08-30
Information query
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