Invention Grant
- Patent Title: Microchannel plate and electron multiplier tube with improved gain and suppressed deterioration
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Application No.: US16489004Application Date: 2018-01-23
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Publication No.: US10818484B2Publication Date: 2020-10-27
- Inventor: Takaaki Nagata , Yasumasa Hamana , Hajime Nishimura , Daichi Masuko
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Agency: Faegre Drinker Biddle & Reath LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3cfec17c
- International Application: PCT/JP2018/001984 WO 20180123
- International Announcement: WO2018/159159 WO 20180907
- Main IPC: H01J43/24
- IPC: H01J43/24

Abstract:
A microchannel plate is provided with a substrate including a front surface, a rear surface, and a side surface, a plurality of channels penetrating from the front surface to the rear surface of the substrate, a first film provided on at least an inner wall surface of the channel, a second film provided on at least a part of the first film, and electrode layers provided on the front surface and the rear surface of the substrate. The first film is made of MgO, the second film is made of SiO2, and the second film is thinner than the first film.
Public/Granted literature
- US20200027709A1 MICROCHANNEL PLATE AND ELECTRON MULTIPLIER TUBE Public/Granted day:2020-01-23
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