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公开(公告)号：US09299530B2
公开(公告)日：2016-03-29
申请号：US14425917
申请日：2013-07-31
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Yasumasa Hamana , Takaaki Nagata , Kimitsugu Nakamura
CPC classification number: H01J29/86 , C23C16/45525 , H01J5/08 , H01J5/10 , H01J29/88 , H01J31/50 , H01J40/18
Abstract: In an electron tube, an atomic layer deposition method is used to form an electrical resistance film having a stacked structure of electrically insulating layers and electrically conductive layers or a mixed structure of an electrically insulating material and an electrically conductive material, so as to cover the whole of an inner wall surface and an outer wall surface of a second envelope. By use of the atomic layer deposition method, the firm and fine electrical resistance film with a desired resistance can be formed on an insulation surface, without containing a material such as a binder. When the electrical resistance film is provided with slight electrical conductivity, it can suppress occurrence of withstand voltage failure due to electrification of the insulation surface or the like and realize stability of withstand voltage characteristics.
Abstract translation: 在电子管中，使用原子层沉积法形成具有电绝缘层和导电层的叠层结构或电绝缘材料和导电材料的混合结构的电阻膜，以覆盖 整个内壁表面和第二外壳的外壁表面。 通过使用原子层沉积方法，可以在绝缘表面上形成具有所需电阻的牢固且精细的电阻膜，而不含粘合剂等材料。 当电阻膜具有轻微的导电性时，可以抑制由于绝缘表面等引起的耐电压故障的发生，并且实现耐电压特性的稳定性。
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2.发明授权公开(公告)号：US10818484B2
公开(公告)日：2020-10-27
申请号：US16489004
申请日：2018-01-23
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takaaki Nagata , Yasumasa Hamana , Hajime Nishimura , Daichi Masuko
IPC: H01J43/24
Abstract: A microchannel plate is provided with a substrate including a front surface, a rear surface, and a side surface, a plurality of channels penetrating from the front surface to the rear surface of the substrate, a first film provided on at least an inner wall surface of the channel, a second film provided on at least a part of the first film, and electrode layers provided on the front surface and the rear surface of the substrate. The first film is made of MgO, the second film is made of SiO2, and the second film is thinner than the first film.
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公开(公告)号：US10340129B2
公开(公告)日：2019-07-02
申请号：US15756217
申请日：2016-08-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takaaki Nagata , Yasumasa Hamana , Hajime Nishimura , Kimitsugu Nakamura
Abstract: A microchannel plate is provided with a substrate including a front surface, a rear surface, and a side surface, a plurality of channels penetrating from the front surface to the rear surface of the substrate, a first film provided on at least an inner wall surface of the channel, a second film provided on the first film, and electrode layers provided on the front surface and the rear surface of the substrate. The first film is made of Al2O3. The second film is made of SiO2. The first film is thicker than the second film.
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4.发明申请MICRO-CHANNEL PLATE, METHOD FOR MANUFACTURING MICRO-CHANNEL PLATE, AND IMAGE INTENSIFIER 有权微通道板，制造微通道板的方法和图像增强器公开(公告)号：US20150279639A1
公开(公告)日：2015-10-01
申请号：US14429894
申请日：2013-07-11
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Kimitsugu Nakamura , Yasumasa Hamana , Takaaki Nagata
CPC classification number: H01J43/28 , H01J9/125 , H01J31/507 , H01J43/246
Abstract: In a micro-channel plate, an electron emission film and an ion barrier film formed on a substrate are integrally formed by the same film formation step. In this structure, the electron emission film and the ion barrier film are made as continuous and firm films and the ion barrier film can be made thinner. Since the ion barrier film is formed on the back side of an organic film, the organic film is exposed during removal of the organic film. This prevents the organic film from remaining and thus suppresses degradation of performance of the ion barrier film due to the residual organic film, so as to suppress ion feedback from the micro-channel plate and achieve a sufficient improvement in life characteristics of an image intensifier.
Abstract translation: 在微通道板中，通过相同的成膜步骤一体地形成在基板上形成的电子发射膜和离子阻挡膜。 在该结构中，将电子发射膜和离子阻挡膜制成为连续且牢固的膜，并且可以使离子阻挡膜更薄。 由于离子阻挡膜形成在有机膜的背面上，有机膜在去除有机膜期间暴露。 这样可以防止有机膜残留，从而抑制由残留的有机膜引起的离子阻挡膜的性能的劣化，从而抑制来自微通道板的离子反馈，并实现图像增强器的寿命特性的充分改善。
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公开(公告)号：US20150228439A1
公开(公告)日：2015-08-13
申请号：US14425917
申请日：2013-07-31
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Yasumasa Hamana , Takaaki Nagata , Kimitsugu Nakamura
CPC classification number: H01J29/86 , C23C16/45525 , H01J5/08 , H01J5/10 , H01J29/88 , H01J31/50 , H01J40/18
Abstract: In an electron tube, an atomic layer deposition method is used to form an electrical resistance film having a stacked structure of electrically insulating layers and electrically conductive layers or a mixed structure of an electrically insulating material and an electrically conductive material, so as to cover the whole of an inner wall surface and an outer wall surface of a second envelope. By use of the atomic layer deposition method, the firm and fine electrical resistance film with a desired resistance can be formed on an insulation surface, without containing a material such as a binder. When the electrical resistance film is provided with slight electrical conductivity, it can suppress occurrence of withstand voltage failure due to electrification of the insulation surface or the like and realize stability of withstand voltage characteristics.
Abstract translation: 在电子管中，使用原子层沉积法形成具有电绝缘层和导电层的叠层结构或电绝缘材料和导电材料的混合结构的电阻膜，以覆盖 整个内壁表面和第二外壳的外壁表面。 通过使用原子层沉积方法，可以在绝缘表面上形成具有所需电阻的坚固和精细的电阻膜，而不含粘合剂等材料。 当电阻膜具有轻微的导电性时，可以抑制由于绝缘表面等引起的耐电压故障的发生，并且实现耐电压特性的稳定性。
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Patent Agency Ranking
6.发明授权Micro-channel plate, method for manufacturing micro-channel plate, and image intensifier 有权微通道板，微通道板的制造方法和图像增强器公开(公告)号：US09257266B2
公开(公告)日：2016-02-09
申请号：US14429894
申请日：2013-07-11
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Kimitsugu Nakamura , Yasumasa Hamana , Takaaki Nagata
CPC classification number: H01J43/28 , H01J9/125 , H01J31/507 , H01J43/246
Abstract: In a micro-channel plate, an electron emission film and an ion barrier film formed on a substrate are integrally formed by the same film formation step. In this structure, the electron emission film and the ion barrier film are made as continuous and firm films and the ion barrier film can be made thinner. Since the ion barrier film is formed on the back side of an organic film, the organic film is exposed during removal of the organic film. This prevents the organic film from remaining and thus suppresses degradation of performance of the ion barrier film due to the residual organic film, so as to suppress ion feedback from the micro-channel plate and achieve a sufficient improvement in life characteristics of an image intensifier.
Abstract translation: 在微通道板中，通过相同的成膜步骤一体地形成在基板上形成的电子发射膜和离子阻挡膜。 在该结构中，将电子发射膜和离子阻挡膜制成为连续且牢固的膜，并且可以使离子阻挡膜更薄。 由于离子阻挡膜形成在有机膜的背面上，有机膜在去除有机膜期间暴露。 这样可以防止有机膜残留，从而抑制由残留的有机膜引起的离子阻挡膜的性能的劣化，从而抑制来自微通道板的离子反馈，并实现图像增强器的寿命特性的充分改善。
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公开(公告)号：US20150235825A1
公开(公告)日：2015-08-20
申请号：US14425810
申请日：2013-07-31
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takaaki Nagata , Yasumasa Hamana , Kimitsugu Nakamura
Abstract: In an electron tube, an electrical resistance film having a stacked structure of electrically insulating layers and electrically conductive layers is formed on holding surfaces of bases in insulating substrates. This electrical resistance film is made as a firm and fine film with a desired resistance by use of an atomic layer deposition method, which can suppress electrification of the bases comprised of an insulating material. This makes it feasible to stably maintain withstand voltage characteristics.
Abstract translation: 在电子管中，在绝缘基板的基板的保持面上形成具有电绝缘层和导电层的堆叠结构的电阻膜。 该电阻膜通过使用可以抑制由绝缘材料构成的基体的带电的原子层沉积方法制成具有所需电阻的牢固且细小的膜。 这使得稳定地保持耐压特性成为可能。
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公开(公告)号：US10790129B2
公开(公告)日：2020-09-29
申请号：US16634693
申请日：2018-05-14
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takaaki Nagata , Yoshihiro Ishigami , Yasumasa Hamana
Abstract: A transmissive photocathode includes a light transmitting substrate that has a first surface on which light is incident and a second surface which emits light incident from a side of the first surface, a photoelectric conversion layer that is provided on the second surface side of the light transmitting substrate and converts the light emitted from the second surface into photoelectrons, a light transmitting conductive layer that is provided between the light transmitting substrate and the photoelectric conversion layer and is composed of a single-layered graphene, and a thermal stress alleviation layer that is provided between the photoelectric conversion layer and the light transmitting conductive layer and has light transmissivity. A thermal expansion coefficient of the thermal stress alleviation layer is smaller than a thermal expansion coefficient of the photoelectric conversion layer and larger than a thermal expansion coefficient of the graphene.
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公开(公告)号：US10651027B2
公开(公告)日：2020-05-12
申请号：US16507251
申请日：2019-07-10
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takaaki Nagata , Takeo Fujii , Motohiro Suyama
Abstract: A light-emitting device includes: a substrate having a groove extending in a first direction and a first surface and a second surface respectively arranged to sandwich the groove in a second direction; a first electrode provided on the first surface; a second electrode provided on the second surface; a graphite thin film provided on the first electrode and the second electrode and extending from the first electrode to the second electrode along the second direction in such a way as to be astride the groove; a third electrode provided on the graphite thin film in such a way as to be opposite the first electrode via the graphite thin film; and a fourth electrode provided on the graphite thin film in such a way as to be opposite the second electrode via the graphite thin film.
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10.发明授权公开(公告)号：US10580952B2
公开(公告)日：2020-03-03
申请号：US16162656
申请日：2018-10-17
Applicant: KEIO UNIVERSITY , HAMAMATSU PHOTONICS K.K.
Inventor： Hideyuki Maki , Motohiro Suyama , Takaaki Nagata , Takeo Fujii
Abstract: A light-emitting device according to one embodiment includes: a substrate; a graphite thin film disposed on the substrate; and an electrode provided on a second surface of the graphite thin film on an edge portion of the graphite thin film, the second surface of the graphite thin film being opposite from a first surface of the graphite thin film, the first surface of the graphite thin film opposed to the substrate. A plurality of protrusions for supporting the graphite thin film is formed on a surface of the substrate opposed to the graphite thin film, at least over an entire region where the substrate and a portion of the graphite thin film other than the edge portion overlap each other when viewed along a thickness direction of the substrate.
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