- 专利标题: Seed layers for a non-volatile memory element
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申请号: US16407661申请日: 2019-05-09
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公开(公告)号: US10818837B1公开(公告)日: 2020-10-27
- 发明人: Yuichi Otani , Kazutaka Yamane , Ganesh Kolliyil Rajan
- 申请人: GLOBALFOUNDRIES Singapore Pte. Ltd.
- 申请人地址: SG Singapore
- 专利权人: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- 当前专利权人: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- 当前专利权人地址: SG Singapore
- 代理机构: Thompson Hine LLP
- 主分类号: H01L43/10
- IPC分类号: H01L43/10 ; H01L43/12 ; H01L43/08 ; H01L27/22
摘要:
Structures for a non-volatile memory element and methods of fabricating a structure for a non-volatile memory element. The structure includes a bottom electrode, a seed layer on the bottom electrode, and a magnetic-tunneling-junction layer stack on the seed layer. The seed layer is composed of a nickel-chromium-ruthenium alloy including ruthenium in an amount ranging from seven atomic percent by weight to eighty-four atomic percent by weight.
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