Iodine-containing photoacid generators and compositions comprising the same

Invention Grant

US10831100B2 Iodine-containing photoacid generators and compositions comprising the same 有权

Patent Title: Iodine-containing photoacid generators and compositions comprising the same
Application No.: US15817864

Application Date: 2017-11-20
Publication No.: US10831100B2

Publication Date: 2020-11-10
Inventor: Emad Aqad , James W. Thackeray
Applicant: ROHM AND HAAS ELECTRONIC MATERIALS LLC
Applicant Address: US MA Marlborough
Assignee: ROHM AND HAAS ELECTRONIC MATERIALS, LLC
Current Assignee: ROHM AND HAAS ELECTRONIC MATERIALS, LLC
Current Assignee Address: US MA Marlborough
Agency: Cantor Colburn LLP
Main IPC: G03F7/004
IPC: G03F7/004 ; C07D333/76 ; C07C309/12 ; C07C65/05 ; C07C25/02 ; G03F7/26 ; C07C323/03 ; G03F7/038 ; G03F7/039 ; G03F7/16 ; G03F7/20 ; C07C323/09 ; C07C381/12 ; G03F7/32

Abstract:

A photoacid generator compound having formula (I): wherein, in formula (I), groups and variables are the same as described in the specification.

Public/Granted literature

Information query

Espacenet

IPC分类:

G	物理
G03	摄影术；电影术；利用了光波以外其他波的类似技术；电记录术；全息摄影术
G03F	图纹面的照相制版工艺，例如，印刷工艺、半导体器件的加工工艺；其所用材料；其所用原版；其所用专用设备（照相排版装置入B41B；为摄影用的感光材料或处理入G03C；电记录、感光层或处理入G03G）
G03F7/00	图纹面，例如，印刷表面的照相制版如光刻工艺；图纹面照相制版用的材料，如：含光致抗蚀剂的材料；图纹面照相制版的专用设备（用于特殊工艺的光致抗蚀剂结构见相关的位置，例如，B44C，H01L，例如，H01L21/00，H05K）
G03F7/004	.感光材料（G03F7/12，G03F7/14优先）