- Patent Title: Apparatuses and methods for forming multiple decks of memory cells
-
Application No.: US16419736Application Date: 2019-05-22
-
Publication No.: US10833099B2Publication Date: 2020-11-10
- Inventor: Zhenyu Lu , Roger W. Lindsay , Akira Goda , John Hopkins
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Schwegman Lundberg & Woessner, P.A.
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L27/11582 ; G11C16/14 ; G11C16/34 ; H01L27/11524 ; H01L27/1157 ; H01L27/11556 ; G11C16/26 ; G11C16/04 ; H01L27/11529 ; H01L27/11573

Abstract:
Some embodiments include apparatuses and methods having multiple decks of memory cells and associated control gates. A method includes forming a first deck having alternating conductor materials and dielectric materials and a hole containing materials extending through the conductor materials and the dielectric materials. The methods can also include forming a sacrificial material in an enlarged portion of the hole and forming a second deck of memory cells over the first deck. Additional apparatuses and methods are described.
Public/Granted literature
- US20190288002A1 APPARATUSES AND METHODS FOR FORMING MULTIPLE DECKS OF MEMORY CELLS Public/Granted day:2019-09-19
Information query
IPC分类: