- 专利标题: Plasma reactors having recuperators
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申请号: US16805670申请日: 2020-02-28
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公开(公告)号: US10854429B2公开(公告)日: 2020-12-01
- 发明人: George Stephen Leonard, III , Stefan Andrew McClelland , Jae Mo Koo
- 申请人: ReCarbon, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: RECARBON, INC.
- 当前专利权人: RECARBON, INC.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Patent Office of Dr. Chung Park
- 主分类号: H01J37/32
- IPC分类号: H01J37/32 ; C23C16/511 ; H05H1/46 ; G01J1/04 ; G01J1/42 ; B01J19/12
摘要:
A plasma generating system includes a waveguide for transmitting a microwave energy therethrough and an inner wall disposed within the waveguide to define a plasma cavity, where a plasma is generated within the plasma cavity using the microwave energy. The plasma generating system further includes: an adaptor having a gas outlet through which an exhaust gas processed by the plasma exits the plasma cavity; and a recuperator directly attached to the adaptor and having a gas passageway that is in fluid communication with the gas outlet in the adaptor. The recuperator recovers heat energy from the exhaust gas and heats an input gas using the heat energy.
公开/授权文献
- US20200312638A1 PLASMA REACTORS HAVING RECUPERATORS 公开/授权日:2020-10-01
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