Invention Grant
- Patent Title: Dynamic leveling process heater lift
-
Application No.: US16357101Application Date: 2019-03-18
-
Publication No.: US10854491B2Publication Date: 2020-12-01
- Inventor: Jason M. Schaller , Michael Rohrer , Tuan Anh Nguyen , William Tyler Weaver , Gregory John Freeman , Robert Brent Vopat
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01L21/68
- IPC: H01L21/68 ; C23C16/458 ; H01L21/687 ; H01L21/67 ; C23C16/455 ; C23C16/52 ; G05B19/418 ; H01L21/02
Abstract:
A method and apparatus for of improving processing results in a processing chamber by orienting a substrate support relative to a surface within the processing chamber. The method comprising orienting a supporting surface of a substrate support in a first orientation relative to an output surface of a showerhead, where the first orientation of the supporting surface relative to the output surface is not coplanar, and depositing a first layer of material on a substrate disposed on the supporting surface that is oriented in the first orientation.
Public/Granted literature
- US20190229004A1 DYNAMIC LEVELING PROCESS HEATER LIFT Public/Granted day:2019-07-25
Information query
IPC分类:
