公开(公告)号：US10854491B2

公开(公告)日：2020-12-01

申请号：US16357101

申请日：2019-03-18

Applicant: Applied Materials, Inc.

Inventor： Jason M. Schaller ,  Michael Rohrer ,  Tuan Anh Nguyen ,  William Tyler Weaver ,  Gregory John Freeman ,  Robert Brent Vopat

IPC: H01L21/68 ,  C23C16/458 ,  H01L21/687 ,  H01L21/67 ,  C23C16/455 ,  C23C16/52 ,  G05B19/418 ,  H01L21/02

Abstract: A method and apparatus for of improving processing results in a processing chamber by orienting a substrate support relative to a surface within the processing chamber. The method comprising orienting a supporting surface of a substrate support in a first orientation relative to an output surface of a showerhead, where the first orientation of the supporting surface relative to the output surface is not coplanar, and depositing a first layer of material on a substrate disposed on the supporting surface that is oriented in the first orientation.