Invention Grant
- Patent Title: Three-dimensional memory device including signal and power connection lines extending through dielectric regions and methods of making the same
-
Application No.: US16404844Application Date: 2019-05-07
-
Publication No.: US10861873B2Publication Date: 2020-12-08
- Inventor: Jee-Yeon Kim , Kwang-Ho Kim , Fumiaki Toyama
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11519 ; H01L27/11524 ; H01L27/11573 ; H01L27/11529 ; G11C5/06 ; H01L27/11556 ; H01L27/11558 ; H01L27/11565 ; H01L27/1157

Abstract:
A three-dimensional memory device includes a plurality of alternating stacks of insulating layers and electrically conductive layers located over a substrate, clusters of memory stack structures vertically extending through a respective one of the alternating stacks, and bit lines electrically connected to an upper end of a respective subset of the vertical semiconductor channels. In one embodiment, a subset of the bit lines can include a respective multi-level structure. Each multi-level structure includes bit-line-level bit line segments and an interconnection line segment located at a different level from the bit-line-level bit line segments. In another embodiment, groups of alternating stacks can be alternately indented along a horizontal direction perpendicular to the bit lines to provide dielectric material portions located in lateral indentation regions. Metal line structures connecting contact via structures can extend parallel to bit lines to provide electrical connections between word lines and underlying field effect transistors.
Public/Granted literature
Information query
IPC分类: