Invention Grant
- Patent Title: Accelerometer
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Application No.: US16056699Application Date: 2018-08-07
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Publication No.: US10884020B2Publication Date: 2021-01-05
- Inventor: Alan Malvern , Louise Snell
- Applicant: Atlantic Inertial Systems Limited
- Applicant Address: GB Plymouth
- Assignee: Atlantic Inertial Systems Limited
- Current Assignee: Atlantic Inertial Systems Limited
- Current Assignee Address: GB Plymouth
- Agency: Cantor Colburn LLP
- Priority: GB1712661.6 20170807
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01P15/13 ; G01P15/08

Abstract:
A sensing structure for an accelerometer includes a support and a proof mass mounted thereto by flexible legs. The proof mass has moveable electrode fingers perpendicular to the sensing direction and at least four fixed capacitor electrodes, with fixed capacitor electrode fingers perpendicular to the sensing direction. The fixed capacitor electrode fingers interdigitate with the movable electrode fingers and the proof mass is mounted to the support by an anchor on a centre line of the proof mass. The proof mass has an outer frame surrounding the fixed capacitor electrodes and the flexible legs extend laterally inwardly from the proof mass to the anchor. The fixed capacitor electrodes comprise two inner electrodes, one on each side of the proof mass centre line, and two outer electrodes, one on each side of the proof mass centre line.
Public/Granted literature
- US20190041422A1 ACCELEROMETER Public/Granted day:2019-02-07
Information query
IPC分类: