公开(公告)号：US09476907B2

公开(公告)日：2016-10-25

申请号：US14349942

申请日：2012-10-02

Applicant: Atlantic Inertial Systems Limited

Inventor： Alan Malvern ,  Louise Snell ,  Steven Westbury

IPC: G01P15/135 ,  G01P15/125 ,  G01P15/08

CPC classification number: G01P15/135 ,  G01P15/125 ,  G01P2015/0857

Abstract: An accelerometer comprises a support (12), a proof mass (14) supported for movement relative to the support (12) by a plurality of mounting legs (16), a plurality of fixed capacitor fingers associated with the support (12) and a plurality of movable capacitor fingers associated with the proof mass (14), the fixed capacitor fingers being interdigitated with the movable capacitor fingers, the mounting legs (16) being of serpentine shape, each mounting leg (16) comprising at least a first generally straight section (16a), a second generally straight section (16a), and an end section (16b) of generally U-shaped form interconnecting the first and second generally straight sections (16a), wherein the thickness Te of the end section (16b) is greater than the thickness Tc of a central part (16c) of both of the first and second generally straight sections (16a).

Abstract translation: 加速度计包括支撑件（12），支撑用于通过多个安装腿（16）相对于支撑件（12）运动的检测质量块（14），与支撑件（12）相关联的多个固定电容器手指和 与所述检测质量块（14）相关联的多个可移动电容器指状物，所述固定电容器指状物与所述可移动电容器指状物相互交错，所述安装腿（16）具有蛇形形状，每个安装腿部（16）至少包括第一大致直线 （16a），第二大致直线部分（16a）和大致U形形状的端部部分（16b），其互连第一和第二大致直线部分（16a），其中端部部分（16b）的厚度Te 大于第一和第二大致直的部分（16a）的中心部分（16c）的厚度Tc。

公开(公告)号：US10884020B2

公开(公告)日：2021-01-05

申请号：US16056699

申请日：2018-08-07

Applicant: Atlantic Inertial Systems Limited

Inventor： Alan Malvern ,  Louise Snell

IPC: G01P15/125 ,  G01P15/13 ,  G01P15/08

Abstract: A sensing structure for an accelerometer includes a support and a proof mass mounted thereto by flexible legs. The proof mass has moveable electrode fingers perpendicular to the sensing direction and at least four fixed capacitor electrodes, with fixed capacitor electrode fingers perpendicular to the sensing direction. The fixed capacitor electrode fingers interdigitate with the movable electrode fingers and the proof mass is mounted to the support by an anchor on a centre line of the proof mass. The proof mass has an outer frame surrounding the fixed capacitor electrodes and the flexible legs extend laterally inwardly from the proof mass to the anchor. The fixed capacitor electrodes comprise two inner electrodes, one on each side of the proof mass centre line, and two outer electrodes, one on each side of the proof mass centre line.