Invention Grant
- Patent Title: High efficiency laser-sustained plasma light source
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Application No.: US15187590Application Date: 2016-06-20
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Publication No.: US10887974B2Publication Date: 2021-01-05
- Inventor: Matthew Derstine , Ilya Bezel , Anatoly Shchemelinin , Eugene Shifrin
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: H05G2/00
- IPC: H05G2/00 ; H05H1/24

Abstract:
A system for generating laser sustained broadband light includes a pump source configured to generate a pumping beam, a gas containment structure for containing a gas and a multi-pass optical assembly. The multi-pass optical assembly includes one or more optical elements configured to perform a plurality of passes of the pumping beam through a portion of the gas to sustain a broadband-light-emitting plasma. The one or more optical elements are arranged to collect an unabsorbed portion of the pumping beam transmitted through the plasma and direct the collected unabsorbed portion of the pumping beam back into the portion of the gas.
Public/Granted literature
- US20160381776A1 High Efficiency Laser-Sustained Plasma Light Source Public/Granted day:2016-12-29
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