Invention Grant
- Patent Title: Magnifying observation apparatus
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Application No.: US16595551Application Date: 2019-10-08
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Publication No.: US10890747B2Publication Date: 2021-01-12
- Inventor: Woobum Kang , Hayato Ohba
- Applicant: Keyence Corporation
- Applicant Address: JP Osaka
- Assignee: Keyence Corporation
- Current Assignee: Keyence Corporation
- Current Assignee Address: JP Osaka
- Agency: Kilyk & Bowersox, P.L.L.C.
- Priority: JP2018-223947 20181129
- Main IPC: G02B21/06
- IPC: G02B21/06 ; G02B21/36 ; G02B21/02

Abstract:
A magnifying observation apparatus obtains a plurality of first luminance images by controlling an illumination section so as to illuminate an observation target with illumination light from a first illumination direction and controlling a change section and an imaging section so as to image the observation target, obtains a plurality of second luminance images by controlling the illumination section so as to illuminate the observation target with illumination light from a second illumination direction symmetric with the first illumination direction about an optical axis and controlling the change section and the imaging section so as to image the observation target in a plurality of different focal positions, and generates a roughness enhancement image that enhances roughness on the surface of the observation target by applying depth synthesis and roughness enhancement.
Public/Granted literature
- US20200174240A1 Magnifying Observation Apparatus Public/Granted day:2020-06-04
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