公开(公告)号：US10890747B2

公开(公告)日：2021-01-12

申请号：US16595551

申请日：2019-10-08

Applicant: Keyence Corporation

Inventor： Woobum Kang ,  Hayato Ohba

IPC: G02B21/06 ,  G02B21/36 ,  G02B21/02

Abstract: A magnifying observation apparatus obtains a plurality of first luminance images by controlling an illumination section so as to illuminate an observation target with illumination light from a first illumination direction and controlling a change section and an imaging section so as to image the observation target, obtains a plurality of second luminance images by controlling the illumination section so as to illuminate the observation target with illumination light from a second illumination direction symmetric with the first illumination direction about an optical axis and controlling the change section and the imaging section so as to image the observation target in a plurality of different focal positions, and generates a roughness enhancement image that enhances roughness on the surface of the observation target by applying depth synthesis and roughness enhancement.