公开(公告)号：US09383569B2

公开(公告)日：2016-07-05

申请号：US13648571

申请日：2012-10-10

Applicant: Keyence Corporation

Inventor： Woobum Kang

IPC: G02B21/36 ,  G02B21/24 ,  H04N5/232 ,  G01N21/64

CPC classification number: G02B21/244 ,  G01N21/6458 ,  G02B21/365 ,  H04N5/23212

Abstract: Provided is a magnification observation device in which a focus of the imaging unit can be focused on the observation surface of the object in observation object region in a short period of time. An unit region of an observation object is imaged at a plurality of Z-positions by moving a object lens in the light-axis direction, the plurality of pieces of image data corresponding to the unit region are captured. An image of the observation object is displayed in the display unit as a navigation image. Shape data which indicates the position of the surface of the observation object in the unit region is generated. An observation object region on observation object is designated based on the navigation image. Based on the generated shape data, a focus of the object lens is on the surface of the observation object on the observation object region designated.

Abstract translation: 提供了一种放大观察装置，其中成像单元的焦点可以在短时间内聚焦在观察对象区域中的物体的观察表面上。 通过在光轴方向移动物镜，在多个Z位置对观察对象的单位区域进行成像，捕获与单位区域对应的多条图像数据。 观察对象的图像作为导航图像显示在显示单元中。 产生表示观察对象在单位区域中的表面位置的形状数据。 基于导航图像来指定观察对象的观察对象区域。 基于生成的形状数据，物镜的焦点在被指定的观察对象区域上的观察对象的表面上。

公开(公告)号：US20130093872A1

公开(公告)日：2013-04-18

申请号：US13648571

申请日：2012-10-10

Applicant: Keyence Corporation

Inventor： Woobum Kang

IPC: H04N5/232

CPC classification number: G02B21/244 ,  G01N21/6458 ,  G02B21/365 ,  H04N5/23212

Abstract: Provided is a magnification observation device in which a focus of the imaging unit can be focused on the observation surface of the object in observation object region in a short period of time. An unit region of an observation object is imaged at a plurality of Z-positions by moving a object lens in the light-axis direction, the plurality of pieces of image data corresponding to the unit region are captured. An image of the observation object is displayed in the display unit as a navigation image. Shape data which indicates the position of the surface of the observation object in the unit region is generated. An observation object region on observation object is designated based on the navigation image. Based on the generated shape data, a focus of the object lens is on the surface of the observation object on the observation object region designated.

Abstract translation: 提供了一种放大观察装置，其中成像单元的焦点可以在短时间内聚焦在观察对象区域中的物体的观察表面上。 通过在光轴方向移动物镜，在多个Z位置对观察对象的单位区域进行成像，捕获与单位区域对应的多条图像数据。 观察对象的图像作为导航图像显示在显示单元中。 产生表示观察对象在单位区域中的表面位置的形状数据。 基于导航图像来指定观察对象的观察对象区域。 基于生成的形状数据，物镜的焦点在被指定的观察对象区域上的观察对象的表面上。

公开(公告)号：US10890747B2

公开(公告)日：2021-01-12

申请号：US16595551

申请日：2019-10-08

Applicant: Keyence Corporation

Inventor： Woobum Kang ,  Hayato Ohba

IPC: G02B21/06 ,  G02B21/36 ,  G02B21/02

Abstract: A magnifying observation apparatus obtains a plurality of first luminance images by controlling an illumination section so as to illuminate an observation target with illumination light from a first illumination direction and controlling a change section and an imaging section so as to image the observation target, obtains a plurality of second luminance images by controlling the illumination section so as to illuminate the observation target with illumination light from a second illumination direction symmetric with the first illumination direction about an optical axis and controlling the change section and the imaging section so as to image the observation target in a plurality of different focal positions, and generates a roughness enhancement image that enhances roughness on the surface of the observation target by applying depth synthesis and roughness enhancement.

公开(公告)号：US09829690B2

公开(公告)日：2017-11-28

申请号：US14481936

申请日：2014-09-10

Applicant: Keyence Corporation

Inventor： Woobum Kang

IPC: G02B21/00 ,  H04N7/18 ,  G02B21/06 ,  H04N5/225 ,  H04N5/235 ,  G02B21/12 ,  G02B21/16 ,  G02B21/36 ,  G02B21/24

CPC classification number: G02B21/06 ,  G02B21/0088 ,  G02B21/12 ,  G02B21/16 ,  G02B21/244 ,  G02B21/367 ,  H04N5/2256 ,  H04N5/2354

Abstract: To provide a microscopic imaging device in which a measuring object can be easily imaged using measurement light having a desired pattern, in which the pattern of measurement light can be changed and a phase of the pattern can be moved, without arranging a mechanical mechanism. An arbitrary pattern of a plurality of patterns of measurement light is instructed. The measurement light having an instructed pattern is generated by a light modulation element, and is applied on a measuring object. A spatial phase of the generated pattern is sequentially moved on the measuring object by a predetermined amount by the light modulation element. A plurality of pieces of pattern image data generated at a plurality of phases of the pattern is synthesized based on the light receiving signal output from the light receiving section to generate sectioning image data indicating an image of the measuring object.

公开(公告)号：US20150116477A1

公开(公告)日：2015-04-30

申请号：US14481938

申请日：2014-09-10

Applicant: Keyence Corporation

Inventor： Woobum Kang

IPC: G02B21/06 ,  H04N5/235 ,  H04N5/225

CPC classification number: G02B21/06 ,  G02B7/36 ,  G02B21/365 ,  H04N5/2256 ,  H04N5/23212 ,  H04N5/2354

Abstract: To provide a microscopic imaging device, a microscopic imaging method, and a microscopic imaging program capable of detecting a focused position through an appropriate method corresponding to the imaging method. In a sectioning observation, a measuring object is irradiated with pattern measurement light, and sectioning image data is generated. In a normal observation, the measuring object is irradiated with uniform measurement light to generate normal image data. Relative positions of an objective lens and the stage are changed a plurality of times in an optical axis direction of the objective lens by a focus position adjustment mechanism. When the sectioning observation is instructed, a focused position is detected based on the value of each piece of pixel data of the sectioning image data. When the normal observation is instructed, a focused position is detected based on a local contrast of the normal image data.

Abstract translation: 提供显微成像装置，显微镜成像方法和能够通过对应于成像方法的适当方法检测聚焦位置的显微成像程序。 在切片观察中，用图案测量光照射测量对象，并产生分割图像数据。 在正常观察中，用均匀的测量光照射测量对象以产生正常图像数据。 通过聚焦位置调节机构，物镜和台架的相对位置在物镜的光轴方向上多次改变。 当指示切片观察时，基于分割图像数据的每个像素数据的值来检测聚焦位置。 当指示正常观察时，基于正常图像数据的局部对比度来检测聚焦位置。

公开(公告)号：US20150116476A1

公开(公告)日：2015-04-30

申请号：US14481936

申请日：2014-09-10

Applicant: Keyence Corporation

Inventor： Woobum Kang

IPC: G02B21/06 ,  H04N5/235 ,  H04N5/225

CPC classification number: G02B21/06 ,  G02B21/0088 ,  G02B21/12 ,  G02B21/16 ,  G02B21/244 ,  G02B21/367 ,  H04N5/2256 ,  H04N5/2354

Abstract: To provide a microscopic imaging device in which a measuring object can be easily imaged using measurement light having a desired pattern, in which the pattern of measurement light can be changed and a phase of the pattern can be moved, without arranging a mechanical mechanism. An arbitrary pattern of a plurality of patterns of measurement light is instructed. The measurement light having an instructed pattern is generated by a light modulation element, and is applied on a measuring object. A spatial phase of the generated pattern is sequentially moved on the measuring object by a predetermined amount by the light modulation element. A plurality of pieces of pattern image data generated at a plurality of phases of the pattern is synthesized based on the light receiving signal output from the light receiving section to generate sectioning image data indicating an image of the measuring object.

Abstract translation: 为了提供一种显微成像装置，其中可以使用具有期望图案的测量光容易地成像测量对象，其中可以改变测量光的图案并且可以移动图案的相位，而不设置机械机构。 指示测量光的多个图案的任意图案。 具有指示图案的测量光由光调制元件产生，并被施加在测量对象上。 所产生的图案的空间相位通过光调制元件在测量对象上依次移动预定量。 基于从光接收部输出的光接收信号，合成在图案的多个相位生成的多条图案图像数据，生成表示测量对象的图像的分割图像数据。