Invention Grant
- Patent Title: Scaled gate contact and source/drain cap
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Application No.: US16169269Application Date: 2018-10-24
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Publication No.: US10892338B2Publication Date: 2021-01-12
- Inventor: Hui Zang , Ruilong Xie , Jae Gon Lee
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Calderon Safran & Cole, P.C.
- Agent Francois Pagette; Andrew M. Calderon
- Main IPC: H01L29/417
- IPC: H01L29/417 ; H01L29/08 ; H01L29/51 ; H01L29/78 ; H01L29/66 ; H01L23/528 ; H01L21/768 ; H01L23/522

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to a scaled gate contact and source/drain cap and methods of manufacture. The structure includes: a gate structure comprising an active region; source and drain contacts adjacent to the gate structure; a capping material over the source and drain contacts; a gate contact formed directly above the active region of the gate structure and over the capping material; a U-shape dielectric material around the gate contact, above the source and drain contacts; and a contact in direct electrical contact to the source and drain contacts.
Information query
IPC分类: