Invention Grant
- Patent Title: Micromechanical rotational rate sensor system and corresponding production method
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Application No.: US16127791Application Date: 2018-09-11
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Publication No.: US10900785B2Publication Date: 2021-01-26
- Inventor: Niels Bode , Andreas Lassi , Burkhard Kuhlmann , Jan-Timo Liewald , Matthias Kuehnel , Nils Felix Kuhlmann , Odd-Axel Pruetz , Peter Degenfeld-Schonburg , Reinhard Neul
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright Us LLP
- Agent Gerard Messina
- Priority: DE102017216010 20170912
- Main IPC: G01C19/5762
- IPC: G01C19/5762 ; G01C19/5747 ; G01C19/5712

Abstract:
A micromechanical rotational rate sensor system includes a first rotational rate sensor device that can be driven rotationally about a first axis in oscillating fashion for acquiring a first external rate of rotation about a second axis and a second external rate of rotation about a third axis, the first, second, and third axes being perpendicular to one another; and a second rotational rate sensor device, capable of being driven in linearly oscillating fashion along the second axis, for acquiring a third external rate of rotation about the first axis. The first rotational rate sensor device is connected to the second rotational rate sensor device via a drive frame device. The drive frame device has a first drive frame and a second drive frame that are capable of being driven in oscillating fashion by the drive device with opposite phase along the third axis.
Public/Granted literature
- US20190078887A1 MICROMECHANICAL ROTATIONAL RATE SENSOR SYSTEM AND CORRESPONDING PRODUCTION METHOD Public/Granted day:2019-03-14
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