公开(公告)号：US11466985B2

公开(公告)日：2022-10-11

申请号：US16636798

申请日：2018-07-30

申请人： Robert Bosch GmbH

发明人： Jan-Timo Liewald ,  Andreas Lassl ,  Burkhard Kuhlmann ,  Matthias Kuehnel ,  Niels Bode ,  Nils Felix Kuhlmann ,  Odd-Axel Pruetz ,  Peter Degenfeld-Schonburg ,  Reinhard Neul

IPC分类号： G01C19/5705 ,  G01C19/5747 ,  G01C19/5783 ,  G01C19/5733

摘要： A rotation-rate sensor having a substrate, the substrate having a main-extension-plane, and the rotation-rate sensor includes at least one first and one second mass-element which are oscillate-able, and a first main-extension-direction of the substrate points from the first mass-element to the second mass-element, and a coupling-structure is situated in the first main-extension-direction between the first and second mass-element, in which a first coupling-region of the coupling-structure is situated in a first function-layer, and a first mass-region of the first mass-element is situated in the first function-layer and a second mass-region of the first mass-element is situated in a second function-layer, the first function-layer being situated in an extension-direction perpendicular to the main-extension-plane between the substrate and the second function-layer, a second main-extension-direction being situated perpendicular to the first main-extension-direction, and the first coupling-region having a greater extension in the first main-extension-direction than in the second main-extension-direction.

公开(公告)号：US20200284583A1

公开(公告)日：2020-09-10

申请号：US16645268

申请日：2018-09-20

申请人： Robert Bosch GmbH

发明人： Andreas Lassl ,  Matthias Kuehnel ,  Niels Bode ,  Nils Felix Kuhlmann ,  Peter Degenfeld-Schonburg ,  Reinhard Neul ,  Frank Schatz

IPC分类号： G01C19/5733 ,  G02B26/08

摘要： A MEMS device and a corresponding operating method. The MEMS device is equipped with an oscillatory micromechanical system, which is excitable in a plurality of useful modes, the oscillatory micromechanical system including at least one system component, which is excitable in at least one parasitic spurious mode by a superposition of the useful modes. An adjusting device is provided, which is configured in such a way that it counteracts the parasitic spurious mode by application of an electromagnetic interaction to the system component.

公开(公告)号：US20190135613A1

公开(公告)日：2019-05-09

申请号：US16173087

申请日：2018-10-29

申请人： Robert Bosch GmbH

发明人： Jochen Reinmuth ,  Matthias Kuehnel

IPC分类号： B81B3/00 ,  B81C1/00 ,  G01P15/08

摘要： A micromechanical z-inertial sensor having a movable MEMS structure developed in a second function layer; first spring elements developed in a first function layer, and a first electrode developed in the first function layer, the first spring elements being connected to the movable MEMS structure and to a substrate, and the first function layer being situated below the second function layer; second spring elements developed in a third function layer, and a second electrode developed in the third function layer, the second spring elements being connected to the movable MEMS structure and to the substrate, and the third function layer being disposed above the second function layer; the movable MEMS structure being deflectable in the z-direction with the aid of the spring elements, and in a defined manner, not being deflectable in the x- and y-directions.

公开(公告)号：US11953323B2

公开(公告)日：2024-04-09

申请号：US17793025

申请日：2021-01-29

申请人： Robert Bosch GmbH

发明人： Reinhard Neul ,  Andreas Lassl ,  Burkhard Kuhlmann ,  Jan-Timo Liewald ,  Matthias Kuehnel ,  Niels Bode ,  Nils Felix Kuhlmann ,  Odd-Axel Pruetz ,  Peter Degenfeld-Schonburg

IPC分类号： G01C19/5747 ,  G01C19/5712

CPC分类号： G01C19/5712 ,  G01C19/5747

摘要： A micromechanical rate-of-rotation sensor set-up, including a first rate-of-rotation sensor device capable of being driven rotationally by a driving device via a drive frame device, so as to oscillate about a first axis, and is for measuring a first outer rate of rotation about a second axis and a second outer rate of rotation about a third axis; and a second rate-of-rotation sensor device capable of being driven by the driving device via the drive frame device, so as to oscillate linearly along the second axis, and is for measuring a third outer rate of rotation about the first axis. The first rate-of-rotation sensor device is connected to the second rate-of-rotation sensor device by the drive frame device. The drive frame device includes a first and second drive frame, which may be driven by the driving device in phase opposition, along the third axis, in an oscillatory manner.

公开(公告)号：US20210333103A1

公开(公告)日：2021-10-28

申请号：US17235363

申请日：2021-04-20

申请人： Robert Bosch GmbH

发明人： Matthias Kuehnel ,  Nils Felix Kuhlmann ,  Robert Maul ,  Rolf Scheben ,  Steffen Markisch ,  Thorsten Balslink ,  Wolfram Geiger

IPC分类号： G01C19/5712 ,  G01P3/44 ,  B81B3/00 ,  G01C25/00

摘要： A micromechanical component for a yaw rate sensor. The component includes a substrate having a substrate surface, a first rotor mass developed in one piece, which is able to be set into a first torsional vibration about a first axis of rotation aligned perpendicular to the substrate surface, and at least one first component of the micromechanical component. The first rotor mass is connected to the at least one first component via at least one first spring element. The at least one first spring element extends through a lateral concavity on the first rotor mass in each case and is connected to a recessed edge region of the first rotor mass. A yaw rate sensor and a production method for a micromechanical component for a yaw rate sensor, are also described.

公开(公告)号：US20210172737A1

公开(公告)日：2021-06-10

申请号：US16761598

申请日：2018-10-25

申请人： Robert Bosch GmbH

发明人： Andreas Lassl ,  Burkhard Kuhlmann ,  Jan-Timo Liewald ,  Matthias Kuehnel ,  Niels Bode ,  Nils Felix Kuhlmann ,  Peter Degenfeld-Schonburg ,  Reinhard Neul

IPC分类号： G01C19/5712 ,  G01C19/5733

摘要： A yaw-rate sensor with a substrate having a main extension plane. The yaw-rate sensor includes a rotation-element assembly, the rotation-element assembly being designed for detecting yaw rates prevailing in a first main extension axis of the substrate and yaw rates prevailing in a second main extension axis of the substrate perpendicular to the first main extension axis. The yaw-rate sensor has a sensor assembly, the sensor assembly being designed for detecting a yaw rate prevailing perpendicular to the main extension plane of the substrate, both the sensor assembly and the rotation-element assembly being drivable with the aid of a drive assembly, the drive assembly being designed for driving movement along the first main extension axis.

公开(公告)号：US20190078887A1

公开(公告)日：2019-03-14

申请号：US16127791

申请日：2018-09-11

申请人： Robert Bosch GmbH

发明人： Niels Bode ,  Andreas Lassl ,  Burkhard Kuhlmann ,  Jan-Timo Liewald ,  Matthias Kuehnel ,  Nils Felix Kuhlmann ,  Odd-Axel Pruetz ,  Peter Degenfeld-Schonburg ,  Reinhard Neul

IPC分类号： G01C19/5762 ,  G01C19/5712

摘要： A micromechanical rotational rate sensor system includes a first rotational rate sensor device that can be driven rotationally about a first axis in oscillating fashion for acquiring a first external rate of rotation about a second axis and a second external rate of rotation about a third axis, the first, second, and third axes being perpendicular to one another; and a second rotational rate sensor device, capable of being driven in linearly oscillating fashion along the second axis, for acquiring a third external rate of rotation about the first axis. The first rotational rate sensor device is connected to the second rotational rate sensor device via a drive frame device. The drive frame device has a first drive frame and a second drive frame that are capable of being driven in oscillating fashion by the drive device with opposite phase along the third axis.

公开(公告)号：US20230095336A1

公开(公告)日：2023-03-30

申请号：US17908081

申请日：2021-04-14

申请人： Robert Bosch GmbH

发明人： Matthias Kuehnel ,  Nils Felix Kuhlmann ,  Robert Maul ,  Rolf Scheben ,  Steffen Markisch ,  Thorsten Balslink ,  Wolfram Geiger

IPC分类号： G01C19/5712 ,  G01C19/5684 ,  G01C25/00

摘要： A micromechanical component for a rotation rate sensor. The micromechanical component includes two rotor masses, mirror symmetrical with respect to a first plane of symmetry aligned perpendicularly to a substrate surface and passing through the center of the two rotor masses, which may be set in rotational vibrating motion about rotational axes aligned perpendicularly to the substrate surface, and four seismic masses, mirror symmetrical with respect to the first plane of symmetry, deflectable in parallel to the first plane of symmetry using the two rotor masses set in their respective rotational vibrating motion. The first rotor mass and a first pair of the four seismic masses connected thereto are mirror symmetrical to the second rotor mass and to a second pair of the four seismic masses connected thereto with respect to a second plane of symmetry aligned perpendicularly to the substrate surface and to the first plane of symmetry.

公开(公告)号：US20230038004A1

公开(公告)日：2023-02-09

申请号：US17793025

申请日：2021-01-29

申请人： Robert Bosch GmbH

发明人： Reinhard Neul ,  Andreas Lassl ,  Burkhard Kuhlmann ,  Jan-Timo Liewald ,  Matthias Kuehnel ,  Niels Bode ,  Nils Felix Kuhlmann ,  Odd-Axel Pruetz ,  Peter Degenfeld-Schonburg

IPC分类号： G01C19/5712 ,  G01C19/5747

摘要： A micromechanical rate-of-rotation sensor set-up, including a first rate-of-rotation sensor device capable of being driven rotationally by a driving device via a drive frame device, so as to oscillate about a first axis, and is for measuring a first outer rate of rotation about a second axis and a second outer rate of rotation about a third axis; and a second rate-of-rotation sensor device capable of being driven by the driving device via the drive frame device, so as to oscillate linearly along the second axis, and is for measuring a third outer rate of rotation about the first axis. The first rate-of-rotation sensor device is connected to the second rate-of-rotation sensor device by the drive frame device. The drive frame device includes a first and second drive frame, which may be driven by the driving device in phase opposition, along the third axis, in an oscillatory manner.

公开(公告)号：US11421991B2

公开(公告)日：2022-08-23

申请号：US16761598

申请日：2018-10-25

申请人： Robert Bosch GmbH

发明人： Andreas Lassl ,  Burkhard Kuhlmann ,  Jan-Timo Liewald ,  Matthias Kuehnel ,  Niels Bode ,  Nils Felix Kuhlmann ,  Peter Degenfeld-Schonburg ,  Reinhard Neul

IPC分类号： G01C19/5712 ,  G01C19/5747 ,  G01C19/5733

摘要： A yaw-rate sensor with a substrate having a main extension plane. The yaw-rate sensor includes a rotation-element assembly, the rotation-element assembly being designed for detecting yaw rates prevailing in a first main extension axis of the substrate and yaw rates prevailing in a second main extension axis of the substrate perpendicular to the first main extension axis. The yaw-rate sensor has a sensor assembly, the sensor assembly being designed for detecting a yaw rate prevailing perpendicular to the main extension plane of the substrate, both the sensor assembly and the rotation-element assembly being drivable with the aid of a drive assembly, the drive assembly being designed for driving movement along the first main extension axis.