Invention Grant
- Patent Title: Film formation apparatus
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Application No.: US16123709Application Date: 2018-09-06
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Publication No.: US10903059B2Publication Date: 2021-01-26
- Inventor: Daisuke Ono , Yu Kambe
- Applicant: SHIBAURA MECHATRONICS CORPORATION
- Applicant Address: JP Yokohama
- Assignee: SHIBAURA MECHATRONICS CORPORATION
- Current Assignee: SHIBAURA MECHATRONICS CORPORATION
- Current Assignee Address: JP Yokohama
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer
- Priority: JP2017-172504 20170907
- Main IPC: C23C14/34
- IPC: C23C14/34 ; H01J37/34 ; H01J37/32 ; C23C14/00 ; C23C14/50 ; H01L21/687 ; C23C14/08 ; H01L21/02 ; H01L21/285

Abstract:
A film formation apparatus includes a chamber which has an interior capable of being vacuumed, and which includes a lid that is openable and closable on the upper part of the chamber, a rotation table which is provided in the chamber and which and carries a workpiece in the circular trajectory, a film formation unit that deposits film formation materials by sputtering on the workpiece carried by the rotation table to form films, a shielding member which is provided with an opening at the side which the workpiece passes through, and which forms a film formation room where the film formations by the film formation units are performed, and a support which supports the shielding member, and which is independent relative to the chamber and is independent from the lid.
Public/Granted literature
- US20190074167A1 FILM FORMATION APPARATUS Public/Granted day:2019-03-07
Information query
IPC分类: