Invention Grant
- Patent Title: Bulk acoustic wave resonator
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Application No.: US15789024Application Date: 2017-10-20
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Publication No.: US10903814B2Publication Date: 2021-01-26
- Inventor: Won Han , Chang Hyun Lim , Yong Suk Kim , Seung Hun Han , Sung Jun Lee , Sang Kee Yoon , Tae Yoon Kim
- Applicant: Samsung Electro-Mechanics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: NSIP Law
- Priority: KR10-2016-0161699 20161130,KR10-2017-0064021 20170524
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/17 ; H01L41/047 ; H03H9/54

Abstract:
A bulk acoustic wave resonator includes a membrane layer, together with a substrate, forming a cavity, a lower electrode disposed on the membrane layer, a piezoelectric layer disposed on a flat surface of the lower electrode and an upper electrode covering a portion of the piezoelectric layer. An overall region at a side of the piezoelectric layer is exposed to the air. The side of the piezoelectric layer has a gradient of 65° to 90° with respect to a top surface of the lower electrode.
Public/Granted literature
- US20180152168A1 BULK ACOUSTIC WAVE RESONATOR Public/Granted day:2018-05-31
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