Invention Grant
- Patent Title: Smart chamber and smart chamber components
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Application No.: US16203353Application Date: 2018-11-28
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Publication No.: US10930479B2Publication Date: 2021-02-23
- Inventor: Simon Nicholas Binns , Brian T. West , Ronald Vern Schauer , Roger M. Johnson , Michael S. Cox
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01J37/34
Abstract:
A process chamber includes a chamber body having a chamber lid assembly disposed thereon, one or more monitoring devices coupled to the chamber lid assembly, and one or more antennas disposed adjacent to the chamber lid assembly that are in communication with the one or more monitoring devices.
Public/Granted literature
- US20190096643A1 SMART CHAMBER AND SMART CHAMBER COMPONENTS Public/Granted day:2019-03-28
Information query
