公开(公告)号：US10930479B2

公开(公告)日：2021-02-23

申请号：US16203353

申请日：2018-11-28

Applicant: Applied Materials, Inc.

Inventor： Simon Nicholas Binns ,  Brian T. West ,  Ronald Vern Schauer ,  Roger M. Johnson ,  Michael S. Cox

IPC: H01J37/32 ,  H01J37/34

Abstract: A process chamber includes a chamber body having a chamber lid assembly disposed thereon, one or more monitoring devices coupled to the chamber lid assembly, and one or more antennas disposed adjacent to the chamber lid assembly that are in communication with the one or more monitoring devices.

公开(公告)号：US09892947B2

公开(公告)日：2018-02-13

申请号：US14993596

申请日：2016-01-12

Applicant: Applied Materials, Inc.

Inventor： Ronald Vern Schauer ,  Raphael Dascoli ,  Shivan Bhargava

IPC: H01L21/67 ,  C23C14/50 ,  H01L21/68 ,  H01L21/683 ,  H01L21/687 ,  G01P3/00 ,  G01P13/00 ,  G05B19/418

CPC classification number: H01L21/67259 ,  C23C14/505 ,  G01P3/00 ,  G01P13/00 ,  G05B19/418 ,  G05B2219/45031 ,  H01L21/67115 ,  H01L21/681 ,  H01L21/6838 ,  H01L21/68764 ,  H01L21/68792

Abstract: A chamber monitoring system may include a parallel architecture in which a single sensor control system is coupled to a number of different processing chamber control board sensor lines. In an illustrative embodiment, a single rotation sensor such as a tachometer may reside in a central control unit remote from the processing chambers such that rotation data may be processed by a single system and thereafter routed according to a variety of different network communication protocols to the main system controller, a factory interface, or both. In this and other embodiments, pull-up networks in the central control unit and the chamber control boards are matched so as to reduce electrical signal anomalies such as crowbar effects. The central control unit may be programmed via a main system controller to operate according to user defined parameters, which in turn may enable the system to differentiate between certain operating states.

公开(公告)号：US20190011967A1

公开(公告)日：2019-01-10

申请号：US16044431

申请日：2018-07-24

Applicant: APPLIED MATERIALS, INC.

Inventor： Ronald Vern Schauer ,  Mark Roger Covington ,  Suresh Kumaraswami ,  Amitabh Puri

IPC: G06F1/26 ,  H02J4/00 ,  G06F13/10 ,  G06F9/455 ,  G05B19/02

Abstract: Embodiments of the invention are directed toward systems and methods that execute legacy semiconductor applications using a non-legacy controller. In some embodiments a hardware abstraction layer and/or an emulator can be used to provide communication between a non-legacy operating system and legacy components including legacy applications. In some embodiments various methods and/or devices can be used to emulate and/or translate communications between legacy and non-legacy components.

公开(公告)号：US10153143B2

公开(公告)日：2018-12-11

申请号：US14623419

申请日：2015-02-16

Applicant: Applied Materials, Inc.

Inventor： Simon Nicholas Binns ,  Brian T. West ,  Ronald Vern Schauer ,  Roger M. Johnson ,  Michael S. Cox

IPC: H01J37/34 ,  H01J37/32

Abstract: A process chamber includes a chamber body having a chamber lid assembly disposed thereon, one or more monitoring devices coupled to the chamber lid assembly, and one or more antennas disposed adjacent to the chamber lid assembly that are in communication with the one or more monitoring devices.

公开(公告)号：US10037064B2

公开(公告)日：2018-07-31

申请号：US15194270

申请日：2016-06-27

Applicant: APPLIED MATERIALS, INC.

Inventor： Ronald Vern Schauer ,  Mark Roger Covington ,  Suresh Kumaraswami ,  Amitabh Puri

IPC: G06F1/30 ,  G06F1/26 ,  G06F9/455 ,  G06F13/10 ,  G05B19/02 ,  H02J4/00

CPC classification number: G06F1/263 ,  G05B19/02 ,  G06F9/45508 ,  G06F13/105 ,  H02J4/00 ,  Y10T307/406

Abstract: Embodiments of the invention are directed toward systems and methods that execute legacy semiconductor applications using a non-legacy controller. In some embodiments a hardware abstraction layer and/or an emulator can be used to provide communication between a non-legacy operating system and legacy components including legacy applications. In some embodiments various methods and/or devices can be used to emulate and/or translate communications between legacy and non-legacy components.

公开(公告)号：US20160126121A1

公开(公告)日：2016-05-05

申请号：US14993596

申请日：2016-01-12

Applicant: Applied Materials, Inc.

Inventor： Ronald Vern Schauer ,  Raphael Dascoli ,  Shivan Bhargava

IPC: H01L21/67 ,  G05B19/418 ,  G01P3/00 ,  H01L21/687 ,  G01P13/00

CPC classification number: H01L21/67259 ,  C23C14/505 ,  G01P3/00 ,  G01P13/00 ,  G05B19/418 ,  G05B2219/45031 ,  H01L21/67115 ,  H01L21/681 ,  H01L21/6838 ,  H01L21/68764 ,  H01L21/68792

Abstract: A chamber monitoring system may include a parallel architecture in which a single sensor control system is coupled to a number of different processing chamber control board sensor lines. In an illustrative embodiment, a single rotation sensor such as a tachometer may reside in a central control unit remote from the processing chambers such that rotation data may be processed by a single system and thereafter routed according to a variety of different network communication protocols to the main system controller, a factory interface, or both. In this and other embodiments, pull-up networks in the central control unit and the chamber control boards are matched so as to reduce electrical signal anomalies such as crowbar effects. The central control unit may be programmed via a main system controller to operate according to user defined parameters, which in turn may enable the system to differentiate between certain operating states.

Abstract translation: 室监视系统可以包括其中单个传感器控制系统耦合到多个不同处理室控制板传感器线的并行结构。 在说明性实施例中，诸如转速计的单个旋转传感器可以驻留在远离处理室的中央控制单元中，使得旋转数据可以由单个系统处理，然后根据各种不同的网络通信协议被路由到 主系统控制器，工厂接口或两者兼容。 在该实施例和其他实施例中，中央控制单元和室控制板中的上拉网络匹配，以便减少电信号异常，例如撬棍效应。 中央控制单元可以经由主系统控制器来编程，以根据用户定义的参数进行操作，这进而可以使得系统能够区分某些操作状态。

公开(公告)号：US10974363B2

公开(公告)日：2021-04-13

申请号：US15995006

申请日：2018-05-31

Applicant: Applied Materials, Inc.

Inventor： Ronald Vern Schauer

IPC: B24B37/005 ,  B24B37/30 ,  B24B49/12

Abstract: A chemical mechanical polishing system includes a carrier head having a flexible membrane and a chamber to apply pressure to the flexible membrane, a pressure control unit, a pressure supply line connecting the pressure control unit to the chamber, and a sensor located along the pressure supply line to detect a contaminant in the pressure supply line.

公开(公告)号：US09987718B2

公开(公告)日：2018-06-05

申请号：US14922651

申请日：2015-10-26

Applicant: Applied Materials, Inc.

Inventor： Ronald Vern Schauer

IPC: B24B37/005 ,  B24B37/30 ,  B24B49/12

CPC classification number: B24B37/005 ,  B24B37/30 ,  B24B49/12

Abstract: A chemical mechanical polishing system includes a carrier head having a flexible membrane and a chamber to apply pressure to the flexible membrane, a pressure control unit, a pressure supply line connecting the pressure control unit to the chamber, and a sensor located along the pressure supply line to detect a contaminant in the pressure supply line.

公开(公告)号：US20160306403A1

公开(公告)日：2016-10-20

申请号：US15194270

申请日：2016-06-27

Applicant: APPLIED MATERIALS, INC.

Inventor： Ronald Vern Schauer ,  Mark Roger Covington ,  Suresh Kumaraswami ,  Amitabh Puri

IPC: G06F1/26 ,  H02J4/00

CPC classification number: G06F1/263 ,  G05B19/02 ,  G06F9/45508 ,  G06F13/105 ,  H02J4/00 ,  Y10T307/406

Abstract: Embodiments of the invention are directed toward systems and methods that execute legacy semiconductor applications using a non-legacy controller. In some embodiments a hardware abstraction layer and/or an emulator can be used to provide communication between a non-legacy operating system and legacy components including legacy applications. In some embodiments various methods and/or devices can be used to emulate and/or translate communications between legacy and non-legacy components.

Abstract translation: 本发明的实施例涉及使用非传统控制器执行传统半导体应用的系统和方法。 在一些实施例中，可以使用硬件抽象层和/或仿真器来提供非传统操作系统与包括遗留应用的遗留组件之间的通信。 在一些实施例中，可以使用各种方法和/或设备来模拟和/或翻译传统和非传统组件之间的通信。

公开(公告)号：US09383739B2

公开(公告)日：2016-07-05

申请号：US13771870

申请日：2013-02-20

Applicant: Applied Materials, Inc.

Inventor： Ronald Vern Schauer ,  Mark Roger Covington ,  Suresh Kumaraswami ,  Amitabh Puri

IPC: G06F9/455 ,  G05B19/02 ,  G06F13/10 ,  H02J4/00

CPC classification number: G06F1/263 ,  G05B19/02 ,  G06F9/45508 ,  G06F13/105 ,  H02J4/00 ,  Y10T307/406

Abstract: Embodiments of the invention are directed toward systems and methods that execute legacy semiconductor applications using a non-legacy controller. In some embodiments a hardware abstraction layer and/or an emulator can be used to provide communication between a non-legacy operating system and legacy components including legacy applications. In some embodiments various methods and/or devices can be used to emulate and/or translate communications between legacy and non-legacy components.

Abstract translation: 本发明的实施例涉及使用非传统控制器执行传统半导体应用的系统和方法。 在一些实施例中，可以使用硬件抽象层和/或仿真器来提供非传统操作系统与包括遗留应用的遗留组件之间的通信。 在一些实施例中，可以使用各种方法和/或设备来模拟和/或翻译传统和非传统组件之间的通信。