Invention Grant
- Patent Title: Heating device and heating chamber
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Application No.: US15543472Application Date: 2015-12-30
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Publication No.: US10937672B2Publication Date: 2021-03-02
- Inventor: Jun Zhang , Xuewei Wu , Boyu Dong , Baogang Xu , Henan Zhang , Bingliang Guo , Wen Zhang , Shaohui Liu
- Applicant: BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD
- Applicant Address: CN Beijing
- Assignee: BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD
- Current Assignee: BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD
- Current Assignee Address: CN Beijing
- Agency: Anova Law Group, PLLC
- Priority: CN201510648731.1 20151009,CN201510923022.X 20151210
- International Application: PCT/CN2015/099858 WO 20151230
- International Announcement: WO2017/059645 WO 20170413
- Main IPC: H01L21/67
- IPC: H01L21/67 ; C23C14/54 ; H05B1/02 ; H05B3/00 ; F27D19/00 ; F27D5/00 ; C23C14/35 ; F27D3/00 ; H01L21/687

Abstract:
A heating device and a heating chamber are provided, comprising a base plate (21), at least three supporting columns (22) and a heating assembly, where the at least three supporting columns are arranged vertically on the base plate and are distributed at intervals along a circumferential direction of the base plate Top ends of the at least three supporting columns form a bearing surface for supporting a to-be-heated member (23). The heating assembly includes a heating light tube (24) and a thermal radiation shielding assembly, where the heating light tube is disposed above the base plate and below the bearing surface. A projection of an effective heating area formed by uniform distribution of the heating light tube on the base plate covers a projection of the bearing surface on the base plate. The thermal radiation shielding assembly shields heat radiated by the heating light tube towards surroundings and bottom.
Public/Granted literature
- US20170365493A1 HEATING DEVICE AND HEATING CHAMBER Public/Granted day:2017-12-21
Information query
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