公开(公告)号：US10937672B2

公开(公告)日：2021-03-02

申请号：US15543472

申请日：2015-12-30

Applicant: BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD

Inventor： Jun Zhang ,  Xuewei Wu ,  Boyu Dong ,  Baogang Xu ,  Henan Zhang ,  Bingliang Guo ,  Wen Zhang ,  Shaohui Liu

IPC: H01L21/67 ,  C23C14/54 ,  H05B1/02 ,  H05B3/00 ,  F27D19/00 ,  F27D5/00 ,  C23C14/35 ,  F27D3/00 ,  H01L21/687

Abstract: A heating device and a heating chamber are provided, comprising a base plate (21), at least three supporting columns (22) and a heating assembly, where the at least three supporting columns are arranged vertically on the base plate and are distributed at intervals along a circumferential direction of the base plate Top ends of the at least three supporting columns form a bearing surface for supporting a to-be-heated member (23). The heating assembly includes a heating light tube (24) and a thermal radiation shielding assembly, where the heating light tube is disposed above the base plate and below the bearing surface. A projection of an effective heating area formed by uniform distribution of the heating light tube on the base plate covers a projection of the bearing surface on the base plate. The thermal radiation shielding assembly shields heat radiated by the heating light tube towards surroundings and bottom.