Invention Grant
- Patent Title: Method of manufacturing MEMS switches with reduced switching voltage
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Application No.: US15809066Application Date: 2017-11-10
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Publication No.: US10941036B2Publication Date: 2021-03-09
- Inventor: Stephen E. Luce , Anthony K. Stamper
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Roberts Calderon Safran & Cole, P.C.
- Agent Steven Meyers; Andrew M. Calderon
- Main IPC: B81C1/00
- IPC: B81C1/00 ; H01H1/00 ; H01H49/00 ; H01H11/00 ; H01H59/00 ; H01H1/58 ; H01H50/00 ; H01H1/66

Abstract:
An approach includes a method of fabricating a switch. The approach includes forming a first cantilevered electrode, forming a second cantilevered electrode over an electrode and operable to contact the first cantilevered electrode upon an application of a voltage to the electrode, and forming an arm on the first cantilevered electrode with an extending protrusion extending upward from an upper surface of the arm.
Public/Granted literature
- US20180093884A1 METHOD OF MANUFACTURING MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE Public/Granted day:2018-04-05
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