Invention Grant
- Patent Title: Three-dimensional memory device with drain-select-level isolation structures and method of making the same
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Application No.: US16388054Application Date: 2019-04-18
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Publication No.: US10943917B2Publication Date: 2021-03-09
- Inventor: Takaaki Iwai , Makoto Koto , Sayako Nagamine , Ching-Huang Lu , Wei Zhao , Yanli Zhang , James Kai
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group, PLLC
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11519 ; H01L21/762 ; H01L27/11565 ; H01L27/11556

Abstract:
A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers located over a substrate, and memory pillar structures extending through the alternating stack. Each of the memory pillar structures includes a respective memory film and a respective vertical semiconductor channel. Dielectric cores contact an inner sidewall of a respective one of the vertical semiconductor channels. A drain-select-level isolation structure laterally extends along a first horizontal direction and contacts straight sidewalls of the dielectric cores at a respective two-dimensional flat interface. The memory pillar structures may be formed on-pitch as a two-dimensional periodic array, and themay drain-select-level isolation structure may cut through upper portions of the memory pillar structures to minimize areas occupied by the drain-select-level isolation structure.
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