- Patent Title: Method for frequency trimming a microelectromechanical resonator
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Application No.: US15875943Application Date: 2018-01-19
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Publication No.: US10947111B2Publication Date: 2021-03-16
- Inventor: Benoit Hamelin , Farrokh Ayazi
- Applicant: Georgia Tech Research Corporation
- Applicant Address: US GA Atlanta
- Assignee: Georgia Tech Research Corporation
- Current Assignee: Georgia Tech Research Corporation
- Current Assignee Address: US GA Atlanta
- Agency: Troutman Pepper Hamilton Sanders LLP
- Agent Ryan A. Schneider
- Main IPC: H04R31/00
- IPC: H04R31/00 ; G01R3/00 ; B81C1/00 ; B23K26/20 ; H03H3/013 ; B23K26/34 ; B23K26/351 ; B23K26/00 ; H03H3/04 ; B23K26/354 ; B81B3/00 ; H01L41/253 ; B23K103/00 ; B23K103/08 ; B23K101/40

Abstract:
Embodiments of the present disclosure can include a method for frequency trimming a microelectromechanical resonator, the resonator comprising a substrate and a plurality of loading elements layered on a surface of the substrate, the method comprising: selecting a first loading element of the plurality of loading elements, the first loading element being layered on a surface of a region of interest of the substrate; heating the first loading element and substrate within the region of interest to a predetermined temperature using an optical energy source, causing the first loading element to diffuse into the substrate; and cooling the region of interest to form a eutectic composition layer bonding the loading element and the substrate within the region of interest.
Public/Granted literature
- US20180222748A1 SYSTEMS AND METHODS FOR STIFFNESS TRIMMING OF RESONATORS Public/Granted day:2018-08-09
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