Invention Grant
- Patent Title: MEMS device formed by at least two bonded structural layers and manufacturing process thereof
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Application No.: US16708271Application Date: 2019-12-09
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Publication No.: US10954121B2Publication Date: 2021-03-23
- Inventor: Giorgio Allegato , Laura Oggioni , Matteo Garavaglia , Roberto Somaschini
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: IT102016000066164 20160627
- Main IPC: B81C1/00
- IPC: B81C1/00 ; B81C3/00 ; B81B3/00

Abstract:
A microelectromechanical device having a first substrate of semiconductor material and a second substrate of semiconductor material having a bonding recess delimited by projecting portions, monolithic therewith. The bonding recess forms a closed cavity with the first substrate. A bonding structure is arranged within the closed cavity and is bonded to the first and second substrates. A microelectromechanical structure is formed in a substrate chosen between the first and second substrates. The device is manufactured by forming the bonding recess in a first wafer; depositing a bonding mass in the bonding recess, the bonding mass having a greater depth than the bonding recess; and bonding the two wafers.
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