Invention Grant
- Patent Title: Integrated detection device, in particular detector particles such as particulates or alpha particles
-
Application No.: US16174016Application Date: 2018-10-29
-
Publication No.: US10962659B2Publication Date: 2021-03-30
- Inventor: Sara Loi , Alberto Pagani
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Slater Matsil, LLP
- Priority: ITTO2014A000734 20140917
- Main IPC: G01T1/178
- IPC: G01T1/178 ; G01N15/02 ; G01N15/06 ; G01T1/24 ; G01T1/29 ; F04B19/06 ; F04B37/00 ; G01N15/00 ; G01N15/10 ; G01N1/22

Abstract:
A process for manufacturing an optical system includes forming a first hydrophobic surface at a semiconductor substrate, providing a first drop of transparent material having a first shape on the first hydrophobic surface, and allowing the first drop to harden to form a first optical element having the first shape. The optical system may be a particle detector, and the process may optionally further include forming a light source at the semiconductor substrate configured to generate a light beam that passes through the first optical element and a cavity to a photodetector.
Public/Granted literature
- US20190072676A1 Integrated Detection Device, in Particular Detector Particles such as Particlates or Alpha Particles Public/Granted day:2019-03-07
Information query