Invention Grant
- Patent Title: Support structure for MEMS device with particle filter
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Application No.: US16542489Application Date: 2019-08-16
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Publication No.: US10968097B2Publication Date: 2021-04-06
- Inventor: Chun-Wen Cheng , Chia-Hua Chu , Wen Cheng Kuo
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: B81C1/00
- IPC: B81C1/00 ; B81B3/00 ; B81B7/00 ; B81C3/00 ; H01L23/00 ; H01L23/053

Abstract:
Various embodiments of the present disclosure are directed towards a microphone including a support structure layer disposed between a particle filter and a microelectromechanical systems (MEMS) structure. A carrier substrate is disposed below the particle filter and has opposing sidewalls that define a carrier substrate opening. The MEMS structure overlies the carrier substrate and includes a diaphragm having opposing sidewalls that define a diaphragm opening overlying the carrier substrate opening. The particle filter is disposed between the carrier substrate and the MEMS structure. A plurality of filter openings extend through the particle filter. The support structure layer includes a support structure having one or more segments spaced laterally between the opposing sidewalls of the carrier substrate. The one or more segments of the support structure are spaced laterally between the plurality of filter openings.
Public/Granted literature
- US20210047176A1 SUPPORT STRUCTURE FOR MEMS DEVICE WITH PARTICLE FILTER Public/Granted day:2021-02-18
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