Invention Grant
- Patent Title: Package with metal-insulator-metal capacitor and method of manufacturing the same
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Application No.: US16578359Application Date: 2019-09-22
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Publication No.: US10971441B2Publication Date: 2021-04-06
- Inventor: Shuo-Mao Chen , Der-Chyang Yeh , Chiung-Han Yeh
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L23/498
- IPC: H01L23/498 ; H01L21/56 ; H01L23/00 ; H01L23/538 ; H01L23/31

Abstract:
A package includes a chip formed in a first area of the package and a molding compound formed in a second area of the package adjacent to the first area. A first polymer layer is formed on the chip and the molding compound, a second polymer layer is formed on the first polymer layer, and a plurality of interconnect structures is formed between the first polymer layer and the second polymer layer. A metal-insulator-metal (MIM) capacitor is formed on the second polymer layer and electrically coupled to at least one of the plurality of interconnect structures. A metal bump is formed over and electrically coupled to at least one of the plurality of interconnect structures.
Public/Granted literature
- US20200020623A1 PACKAGE WITH METAL-INSULATOR-METAL CAPACITOR AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2020-01-16
Information query
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