Invention Grant
- Patent Title: Apparatus and circuits with dual threshold voltage transistors and methods of fabricating the same
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Application No.: US16576554Application Date: 2019-09-19
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Publication No.: US10971616B2Publication Date: 2021-04-06
- Inventor: Chan-Hong Chern
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Duane Morris LLP
- Main IPC: H01L29/778
- IPC: H01L29/778 ; H01L27/07 ; H01L29/66 ; H03K17/567

Abstract:
Apparatus and circuits with dual polarization transistors and methods of fabricating the same are disclosed. In one example, a semiconductor structure is disclosed. The semiconductor structure includes: a substrate; an active layer that is formed over the substrate and comprises a first active portion having a first thickness and a second active portion having a second thickness; a first transistor comprising a first source region, a first drain region, and a first gate structure formed over the first active portion and between the first source region and the first drain region; and a second transistor comprising a second source region, a second drain region, and a second gate structure formed over the second active portion and between the second source region and the second drain region, wherein the first thickness is different from the second thickness.
Information query
IPC分类: