Invention Grant
- Patent Title: Resonator device
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Application No.: US15690570Application Date: 2017-08-30
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Publication No.: US10972071B2Publication Date: 2021-04-06
- Inventor: Toshio Nishimura , Yuichi Goto , Kentaro Yoshii , Ville Kaajakari
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo
- Agency: Arent Fox LLP
- Main IPC: H03H9/13
- IPC: H03H9/13 ; H03H9/05 ; H03H9/10 ; H03H9/24 ; H03H9/02 ; H03H9/17 ; H01L41/047

Abstract:
A resonator with stabilized resonant frequency that includes a lower electrode, a plurality of upper electrodes, and a piezoelectric film disposed between the lower electrode and the plurality of upper electrodes. Moreover, an upper lid having a first and second opposing surfaces is provided so that the first surface faces and seals a first surface of the resonator. In addition, a lower lid having a first and second opposing surfaces is provided so that the first surface faces and seals a second surface of the resonator. The resonator further includes a power terminal electrically connected to the upper electrodes and a ground terminal provided on the second surface of the upper lid. The lower electrode is electrically connected to the ground terminal by the upper lid.
Public/Granted literature
- US20180048285A1 RESONATOR DEVICE Public/Granted day:2018-02-15
Information query
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