公开(公告)号：US11909379B2

公开(公告)日：2024-02-20

申请号：US17108007

申请日：2020-12-01

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yoshihisa Inoue ,  Masakazu Fukumitsu ,  Yuichi Goto

IPC: H03H9/10 ,  B81B7/00 ,  H03H9/02 ,  H03H9/24

CPC classification number: H03H9/1057 ,  B81B7/0038 ,  H03H9/02259 ,  H03H9/2457 ,  B81B2201/0271 ,  B81B2207/07

Abstract: A MEMS device that includes a substrate including an element and a connection wiring electrically connected to the element, and a connection portion electrically connected to the connection wiring. The connection portion is formed of a eutectic alloy of a first metal and a second metal. A line width of the connection wiring is smaller than a width of the connection portion when a main surface of the substrate is viewed in a plan view.

公开(公告)号：US11894831B2

公开(公告)日：2024-02-06

申请号：US17174792

申请日：2021-02-12

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yuichi Goto ,  Ryota Kawai

IPC: H03H9/17 ,  H03H15/00 ,  H03H9/02 ,  H03H9/15

CPC classification number: H03H9/17 ,  H03H9/02433 ,  H03H2009/02456 ,  H03H2009/155 ,  H03H2015/005

Abstract: A resonance device is provided that includes a resonator including upper electrodes, a lower electrode, and a piezoelectric thin film formed therebetween. An upper cover is provided with a first surface facing the upper electrodes of the resonator. A power supply terminal is provided on a second surface of the upper cover with the power supply terminal electrically connected to the upper electrodes. Another power supply terminal is on the second surface of the upper cover and is electrically connected to the upper electrodes. A ground terminal is provided on the second surface of the upper cover and is electrically connected to the lower electrode. An area of each power supply terminal are different from one other such that a capacitance formed between the first power supply terminal and the ground terminal is approximately equal to a capacitance formed between the second power supply terminal and the ground terminal.

公开(公告)号：US10707831B2

公开(公告)日：2020-07-07

申请号：US15483161

申请日：2017-04-10

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Toshio Nishimura ,  Yuichi Goto ,  Daisuke Nakamura

IPC: H01L41/053 ,  H01L41/047 ,  H01L41/09 ,  H03H9/13 ,  H03H9/02 ,  H03H9/24 ,  H03H9/10 ,  H03H9/05 ,  H03H9/17

Abstract: A resonator includes a support frame, a rectangular vibrating plate that performs contour vibration in a predetermined direction, and two pairs of support arms. The vibrating plate includes four vibration regions arranged in a row in the lengthwise direction and electrodes disposed in the vibration regions. Each of the vibration regions vibrate with a phase opposite to phases with which the adjacent vibration regions vibrate upon excitation. A center line of a pair of the electrodes in the lengthwise direction is offset from a center line, in the lengthwise direction, of a corresponding vibration region that includes the electrode disposed thereon.

公开(公告)号：US10659004B2

公开(公告)日：2020-05-19

申请号：US15723344

申请日：2017-10-03

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yuichi Goto ,  Wakana Hirota

IPC: H03H9/21 ,  H03H9/17 ,  H03H9/02 ,  H03H3/007 ,  H03H9/10 ,  H03H9/05 ,  H03H9/24 ,  H03H9/15

Abstract: A resonance device is provided having a resonator with opposing upper and lower lids. The resonator includes a base, and multiple vibration arms that are connected to a front end of the base so as to extend away from the base. Moreover, a frame surrounds a periphery of the base portion and the vibration arms and one or more holding arms connect the base to the frame. The base, the vibration arms, and the holding arm include a substrate and a temperature characteristics correction layer laminated on the substrate and having a material with a coefficient of thermal expansion different from that of the substrate. The base, the vibration arms, and the holding arm are formed integrally with the substrate and the temperature characteristics correction layer.

公开(公告)号：US12021501B2

公开(公告)日：2024-06-25

申请号：US17189832

申请日：2021-03-02

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Ryota Kawai ,  Yuichi Goto ,  Yoshihisa Inoue

IPC: H03H9/17 ,  H03H9/02 ,  H03H9/15

CPC classification number: H03H9/17 ,  H03H9/02244 ,  H03H2009/02488 ,  H03H2009/155

Abstract: A resonator includes a base, at least one vibration arm, a frame, and a holding arm. The vibration arm includes a piezoelectric film, an upper electrode, and a lower electrode. The inequality Fs/Fm

公开(公告)号：US11750173B2

公开(公告)日：2023-09-05

申请号：US17023861

申请日：2020-09-17

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Ryota Kawai ,  Keisuke Takeyama ,  Yuichi Goto

IPC: H03H9/24 ,  H03H9/02 ,  H03H9/05 ,  H03H9/10

CPC classification number: H03H9/2457 ,  H03H9/02448 ,  H03H9/0595 ,  H03H9/1057

Abstract: A resonance device includes a resonator, an upper lid, and a lower lid. The resonator includes a vibration portion, a frame, and holding arms. The vibration portion includes a base and a plurality of vibration arms. The lower lid has a protruding portion protruding between two adjacent vibration arms, the protruding portion has an insulating film, the vibration arms have a weight portion that has a conductive film formed on the insulating film, and in a direction in which the plurality of vibration arms extend, a first distance between the weight portion of any one of the two adjacent vibration arms and the holding portion is less than a second distance between the weight portion and the protruding portion.

公开(公告)号：US20210167754A1

公开(公告)日：2021-06-03

申请号：US17169942

申请日：2021-02-08

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yoshihisa Inoue ,  Ryota Kawai ,  Yuichi Goto

IPC: H03H9/24 ,  B81B7/00 ,  H03H9/05 ,  H03H9/10

Abstract: A resonator is provided that includes a base; at least three vibrating arms that include a piezoelectric film, an upper electrode, and a lower electrode; a frame; and a holding arm. Each vibrating arm includes an arm portion and a tip portion. The holding arm includes a holding side arm that extends parallel to the outer vibrating arm. A release width between the tip portion of the outer vibrating arm and the frame is larger than a release width between the holding side arm and the frame or a release width between the arm portion of the outer vibrating arm and the holding side arm.

公开(公告)号：US10972071B2

公开(公告)日：2021-04-06

申请号：US15690570

申请日：2017-08-30

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Toshio Nishimura ,  Yuichi Goto ,  Kentaro Yoshii ,  Ville Kaajakari

IPC: H03H9/13 ,  H03H9/05 ,  H03H9/10 ,  H03H9/24 ,  H03H9/02 ,  H03H9/17 ,  H01L41/047

Abstract: A resonator with stabilized resonant frequency that includes a lower electrode, a plurality of upper electrodes, and a piezoelectric film disposed between the lower electrode and the plurality of upper electrodes. Moreover, an upper lid having a first and second opposing surfaces is provided so that the first surface faces and seals a first surface of the resonator. In addition, a lower lid having a first and second opposing surfaces is provided so that the first surface faces and seals a second surface of the resonator. The resonator further includes a power terminal electrically connected to the upper electrodes and a ground terminal provided on the second surface of the upper lid. The lower electrode is electrically connected to the ground terminal by the upper lid.

公开(公告)号：US10749496B2

公开(公告)日：2020-08-18

申请号：US16188865

申请日：2018-11-13

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Kentaro Yoshii ,  Yuichi Goto ,  Keisuke Takeyama ,  Toshio Nishimura ,  Shungo Morinaga ,  Ryota Kawai ,  Yoshihisa Inoue

IPC: H03H9/21 ,  H03H9/02 ,  H03H9/10 ,  H03H3/007 ,  H03H9/24 ,  H03H9/05 ,  H03H9/15

Abstract: A resonator is provided having a first electrode and a second electrode; and a piezoelectric film that is disposed between the first and second electrodes, has an upper surface opposing the first electrode, and that vibrates in a predetermined vibration mode when a voltage is applied between the first and second electrodes. Moreover, the resonator includes a protective film made of an insulator and disposed opposing the upper surface of the piezoelectric film with the first electrode interposed therebetween. Furthermore, a conductive film made of a conductor is provided that is disposed opposing the upper surface of the piezoelectric film with the protective film interposed therebetween, where the conductive film is electrically connected to any one of the first and second electrodes.

公开(公告)号：US11876503B2

公开(公告)日：2024-01-16

申请号：US17164287

申请日：2021-02-01

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yuichi Goto ,  Keisuke Takeyama

IPC: H03H9/10 ,  H03H9/24

CPC classification number: H03H9/2457 ,  H03H9/1057

Abstract: A resonance device that includes a lower cover, an upper cover joined to the lower cover, a resonator having vibrating arms that bend and vibrate in a vibration space between the lower cover and the upper cover, and particles attached to tip portions of the vibrating arms. When a median size of the particle is defined as D50, a specific gravity of the particle is defined as A, and a resonant frequency of the resonator is defined as X, D50≤189/(X×√A).