- Patent Title: Optical interferometer with reference arm longer than sample arm
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Application No.: US16232689Application Date: 2018-12-26
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Publication No.: US10976151B2Publication Date: 2021-04-13
- Inventor: Yuan Chin Lee , Ting Wei Chang , Chi Shen Chang , Chy Lin Wang
- Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Applicant Address: TW Hsinchu
- Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee Address: TW Hsinchu
- Agency: Locke Lord LLP
- Agent Tim Tingkang Xia, Esq.
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G02B27/12

Abstract:
An optical interferometer includes a beam splitter module and an optical sensor. The beam splitter module includes a lens assembly and a splitter cube. A light incident surface of the splitter cube is substantially orthogonal to an optical axis of the lens assembly. An acute angle is between the light incident surface and a light splitting surface of the splitter cube. A sampling surface of the splitter cube is substantially parallel to the light incident surface. A light reflecting surface of the splitter cube is substantially orthogonal to the light incident surface. The light incident surface is closer to the lens assembly than the sampling surface. A reference arm is defined between a splitter position on the light splitting surface and the light reflecting surface, a sample arm is defined between the splitter position and the sampling surface, and the reference arm is longer than the sample arm.
Public/Granted literature
- US20200208959A1 OPTICAL INTERFEROMETER Public/Granted day:2020-07-02
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