Invention Grant
- Patent Title: Method for forming ceramic coating having improved plasma resistance and ceramic coating formed thereby
-
Application No.: US15112086Application Date: 2014-12-04
-
Publication No.: US10982331B2Publication Date: 2021-04-20
- Inventor: Mun Ki Lee , Byung Ki Kim , Jae Hyuk Park , Dae Gean Kim , Myoung No Lee
- Applicant: IONES CO., LTD.
- Applicant Address: KR Gyeonggi-do
- Assignee: IONES CO., LTD.
- Current Assignee: IONES CO., LTD.
- Current Assignee Address: KR Gyeonggi-do
- Priority: KR10-2014-0006146 20140117,KR10-2014-0006147 20140117,KR10-2014-0006148 20140117,KR10-2014-0006149 20140117
- International Application: PCT/KR2014/011796 WO 20141204
- International Announcement: WO2015/108277 WO 20150723
- Main IPC: C23C24/04
- IPC: C23C24/04 ; C23C16/06 ; C04B35/447 ; C04B35/505 ; C04B35/622 ; C23C16/44 ; C23C16/458 ; H01J37/32

Abstract:
The present invention relates to a method for forming a ceramic coating having improved plasma resistance and a ceramic coating formed thereby. The present invention discloses the method for forming the ceramic coating having improved plasma resistance and the ceramic coating formed thereby, comprising the steps of: receiving, from a powder supply portion, a plurality of ceramic powders having a first powder particle size range, and transporting the powders using a transport gas; and forming a ceramic coating in which a plurality of first ceramic particles within a first coating particle size range and a plurality of second ceramic particles within a second coating particle size range, which is larger than the first coating particle size range, by causing the transported ceramic powders to collide with a substrate inside a process chamber, at the speed of 100 to 500 m/s so as to be pulverized.
Public/Granted literature
- US20160362795A1 METHOD FOR FORMING CERAMIC COATING HAVING IMPROVED PLASMA RESISTANCE AND CERAMIC COATING FORMED THEREBY Public/Granted day:2016-12-15
Information query
IPC分类: