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公开(公告)号：US20190093711A1
公开(公告)日：2019-03-28
申请号：US15536649
申请日：2015-03-02
Applicant: IONES CO., LTD.
Inventor： MUN KI LEE , JAE DEOK KO , KEUM MO KIM , SOON JONG SONG , JI MAN LEE , YOUNG WON CHOI , JEONG CHAN LEE , JIN HO PARK , BYUNG GI KIM
Abstract: A power transmission shaft performs a fuse-like function when excessive torque is applied to a power input side. The power transmission shaft includes: a main shaft connected to a power device; flanges connected to the power device and provided at both sides of the main shaft; and a flexible coupling extending in the radial direction of the main shaft. The power transmission shaft includes a power shutoff unit which shuts off power by breaking the main shaft or the flanges when torque greater than a predetermined level is applied. When excessive torque is applied to the power input side, the power transmission shaft performs a fuse-like function with respect to the excessive torque, thereby enhancing safety, preventing sparks from occurring at the time of the breakage, facilitating the production thereof, and effectively preventing vibration while sufficiently supporting the speed or load in the event of a high rotation rate.
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2.发明申请METHOD FOR FORMING CERAMIC COATING HAVING IMPROVED PLASMA RESISTANCE AND CERAMIC COATING FORMED THEREBY 审中-公开形成具有改进的等离子体电阻和陶瓷涂层的陶瓷涂层的方法公开(公告)号：US20160362795A1
公开(公告)日：2016-12-15
申请号：US15112086
申请日：2014-12-04
Applicant: IONES CO., LTD.
Inventor： Mun Ki Lee , Byung Ki Kim , Jae Hyuk Park , Dae Gean Kim , Myoung No Lee
IPC: C23C24/04 , C23C16/458 , C04B35/447 , C04B35/622 , C04B35/505 , C23C16/44 , H01J37/32
CPC classification number: C23C24/04 , C04B35/447 , C04B35/505 , C04B35/62222 , C04B2235/5436 , C23C16/06 , C23C16/4404 , C23C16/4581 , H01J37/32495
Abstract: The present invention relates to a method for forming a ceramic coating having improved plasma resistance and a ceramic coating formed thereby. The present invention discloses the method for forming the ceramic coating having improved plasma resistance and the ceramic coating formed thereby, comprising the steps of: receiving, from a powder supply portion, a plurality of ceramic powders having a first powder particle size range, and transporting the powders using a transport gas; and forming a ceramic coating in which a plurality of first ceramic particles within a first coating particle size range and a plurality of second ceramic particles within a second coating particle size range, which is larger than the first coating particle size range, by causing the transported ceramic powders to collide with a substrate inside a process chamber, at the speed of 100 to 500 m/s so as to be pulverized.
Abstract translation: 本发明涉及形成具有改善的等离子体电阻的陶瓷涂层的方法和由此形成的陶瓷涂层。 本发明公开了一种形成具有改善的等离子体电阻的陶瓷涂层的方法和由此形成的陶瓷涂层，其包括以下步骤：从粉末供应部分接收多个具有第一粉末粒度范围的陶瓷粉末，并运送 使用运输气体的粉末; 以及形成陶瓷涂层，其中在第一涂层粒径范围内的多个第一陶瓷颗粒和大于第一涂层粒径范围的第二涂层粒度范围内的多个第二陶瓷颗粒通过使运送 陶瓷粉末以100〜500m / s的速度与处理室内的基板碰撞，从而粉碎。
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公开(公告)号：US20230043972A1
公开(公告)日：2023-02-09
申请号：US17787888
申请日：2020-11-19
Inventor： Dae Gean KIM , Hye Won SEOK , Mun Ki LEE , Hyeong Jun KIM
Abstract: The present invention relates to plasma-resistant glass containing 32-52 mol % of SiO2, 5-15 mol % of Al2O3, 30-35 mol % of CaO, and 0.1-15 mol % of CaF2 as chemical components, and a manufacturing method thereof. According to the present invention, a glass stability index KH is 2.0 or higher, and a plasma-resistant characteristic of an etch rate of lower than 10 nm/min for a mixed plasma of fluorine and argon (Ar) is exhibited.
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公开(公告)号：US20170343051A1
公开(公告)日：2017-11-30
申请号：US15536652
申请日：2015-03-03
Applicant: IONES CO., LTD.
Inventor： MUN KI LEE , JAE DEOK KO , KEUM MO KIM , SOON JONG SONG , JI MAN LEE , YOUNG WON CHOI , JEONG CHAN LEE , JIN HO PARK , BYUNG GI KIM
CPC classification number: F16D3/78 , F16C3/02 , F16C2326/06 , F16C2326/43 , F16D3/005 , F16D3/72 , Y10T403/453
Abstract: A power transmission shaft which alleviates phenomenon in which stress is concentrated on a specific portion of a diaphragm to improve fatigue life span. The power transmission shaft connects a power apparatus and includes a flexible coupling, which is configured by a hub unit positioned inside in a radial direction. A rim unit is positioned outside in a radial direction of the hub unit. A flexible diaphragm unit is positioned between the hub unit and the rim unit. The thickness in the axial direction of the flexible diaphragm unit, from the hub unit toward the rim unit, becomes thinner then thicker to have a minimum thickness interval. The flexible diaphragm unit has a contoured first side on one side in the axial direction and a contoured second side on the other side. The first side has a first inflection point and the second side has a second inflection point.
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Patent Agency Ranking
5.发明公开公开(公告)号：US20240274410A1
公开(公告)日：2024-08-15
申请号：US18566335
申请日：2022-05-13
Applicant: IONES CO., LTD.
Inventor： Dae Gun Kim , Hye Won Seok , KyungMin Lee , Hye In Na , Mun ki Lee
CPC classification number: H01J37/32467 , C03C3/085 , C03C4/20 , H01J37/32495 , C03C2203/10 , C03C2203/52 , H01J9/245 , H01J2237/0213
Abstract: The present invention relates to a plasma-resistant glass, chamber interior parts for a semiconductor manufacturing process, and methods for manufacturing same, and specifically, to a plasma-resistant glass and a method for manufacturing same, wherein the content of components of the plasma-resistant glass can be controlled to reduce the thermal expansion coefficient of the glass and thereby prevent the glass from being damaged due to thermal shock when used at a high-temperature.
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6.发明申请METHOD FOR FORMING COATING HAVING COMPOSITE COATING PARTICLE SIZE AND COATING FORMED THEREBY 审中-公开用于形成具有复合涂层颗粒尺寸和涂层的涂层的方法公开(公告)号：US20160333471A1
公开(公告)日：2016-11-17
申请号：US15112079
申请日：2014-12-04
Applicant: IONES CO., LTD.
Inventor： Mun Ki Lee , Byung Ki Kim , Jae Hyuk Park , Dae Gean Kim , Myoung No Lee
IPC: C23C16/06
CPC classification number: C23C24/04 , C04B35/447 , C04B35/505 , C04B35/62222 , C04B2235/5436 , C23C16/06 , C23C16/4404 , C23C16/4581 , H01J37/32495
Abstract: The present invention discloses the method for forming the coating having the composite coating particle size and the coating formed thereby, comprising the steps of: receiving, from a powder supply portion, a plurality of powders within a first powder particle size range, and transporting the powders using a transport gas; and forming a coating in which a plurality of first particles within a first coating particle size range and a plurality of second particles within a second coating particle size range, which is larger than the first coating particle size range, by causing the transported powders to collide with a substrate inside a process chamber at the speed of 100 to 500 m/s so as to be pulverized.
Abstract translation: 本发明公开了形成具有复合涂层粒度的涂层的方法和由其形成的涂层，包括以下步骤：从粉末供应部分接收在第一粉末粒度范围内的多个粉末，并将 使用运输气体的粉末; 并且通过使所运送的粉末发生碰撞而形成第一涂层粒度范围内的多个第一颗粒和大于第一涂层粒度范围的第二涂层粒径范围内的多个第二颗粒的涂层 在100〜500m / s的速度下将处理室内的基板以粉碎状态进行粉碎。
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公开(公告)号：US20230406755A1
公开(公告)日：2023-12-21
申请号：US18248312
申请日：2021-10-05
Inventor： Dae Gean KIM , Hye Won SEOK , Hyeong Jun KIM
IPC: C03C3/112
CPC classification number: C03C3/112 , C03C2203/10
Abstract: An embodiment of the present invention relates to a plasma-resistant glass, and a manufacturing method therefor, and the present invention is intended to provide a plasma-resistant glass having improved plasma resistance properties, and a manufacturing method therefor. To this end, the present invention provides a plasma-resistant glass including SiO2 in an amount of 40 to 75 mol %, Al2O3 in an amount of 5 to 20 mol %, MgO in an amount of 10 to 40 mol %, and MgF2 in an amount of 0.01 to 10 mol %, and a manufacturing method therefor.
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公开(公告)号：US10982331B2
公开(公告)日：2021-04-20
申请号：US15112086
申请日：2014-12-04
Applicant: IONES CO., LTD.
Inventor： Mun Ki Lee , Byung Ki Kim , Jae Hyuk Park , Dae Gean Kim , Myoung No Lee
IPC: C23C24/04 , C23C16/06 , C04B35/447 , C04B35/505 , C04B35/622 , C23C16/44 , C23C16/458 , H01J37/32
Abstract: The present invention relates to a method for forming a ceramic coating having improved plasma resistance and a ceramic coating formed thereby. The present invention discloses the method for forming the ceramic coating having improved plasma resistance and the ceramic coating formed thereby, comprising the steps of: receiving, from a powder supply portion, a plurality of ceramic powders having a first powder particle size range, and transporting the powders using a transport gas; and forming a ceramic coating in which a plurality of first ceramic particles within a first coating particle size range and a plurality of second ceramic particles within a second coating particle size range, which is larger than the first coating particle size range, by causing the transported ceramic powders to collide with a substrate inside a process chamber, at the speed of 100 to 500 m/s so as to be pulverized.
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9.发明授权公开(公告)号：US10590542B2
公开(公告)日：2020-03-17
申请号：US15112079
申请日：2014-12-04
Applicant: IONES CO., LTD.
Inventor： Mun Ki Lee , Byung Ki Kim , Jae Hyuk Park , Dae Gean Kim , Myoung No Lee
IPC: C23C24/04 , C23C16/06 , C04B35/447 , C04B35/505 , C04B35/622 , C23C16/44 , C23C16/458 , H01J37/32
Abstract: The present invention discloses the method for forming the coating having the composite coating particle size and the coating formed thereby, comprising the steps of: receiving, from a powder supply portion, a plurality of powders within a first powder particle size range, and transporting the powders using a transport gas; and forming a coating in which a plurality of first particles within a first coating particle size range and a plurality of second particles within a second coating particle size range, which is larger than the first coating particle size range, by causing the transported powders to collide with a substrate inside a process chamber at the speed of 100 to 500 m/s so as to be pulverized.
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