公开(公告)号：US20160362795A1

公开(公告)日：2016-12-15

申请号：US15112086

申请日：2014-12-04

Applicant: IONES CO., LTD.

Inventor： Mun Ki Lee ,  Byung Ki Kim ,  Jae Hyuk Park ,  Dae Gean Kim ,  Myoung No Lee

IPC: C23C24/04 ,  C23C16/458 ,  C04B35/447 ,  C04B35/622 ,  C04B35/505 ,  C23C16/44 ,  H01J37/32

CPC classification number: C23C24/04 ,  C04B35/447 ,  C04B35/505 ,  C04B35/62222 ,  C04B2235/5436 ,  C23C16/06 ,  C23C16/4404 ,  C23C16/4581 ,  H01J37/32495

Abstract: The present invention relates to a method for forming a ceramic coating having improved plasma resistance and a ceramic coating formed thereby. The present invention discloses the method for forming the ceramic coating having improved plasma resistance and the ceramic coating formed thereby, comprising the steps of: receiving, from a powder supply portion, a plurality of ceramic powders having a first powder particle size range, and transporting the powders using a transport gas; and forming a ceramic coating in which a plurality of first ceramic particles within a first coating particle size range and a plurality of second ceramic particles within a second coating particle size range, which is larger than the first coating particle size range, by causing the transported ceramic powders to collide with a substrate inside a process chamber, at the speed of 100 to 500 m/s so as to be pulverized.

Abstract translation: 本发明涉及形成具有改善的等离子体电阻的陶瓷涂层的方法和由此形成的陶瓷涂层。 本发明公开了一种形成具有改善的等离子体电阻的陶瓷涂层的方法和由此形成的陶瓷涂层，其包括以下步骤：从粉末供应部分接收多个具有第一粉末粒度范围的陶瓷粉末，并运送 使用运输气体的粉末; 以及形成陶瓷涂层，其中在第一涂层粒径范围内的多个第一陶瓷颗粒和大于第一涂层粒径范围的第二涂层粒度范围内的多个第二陶瓷颗粒通过使运送 陶瓷粉末以100〜500m / s的速度与处理室内的基板碰撞，从而粉碎。

公开(公告)号：US20160333471A1

公开(公告)日：2016-11-17

申请号：US15112079

申请日：2014-12-04

Applicant: IONES CO., LTD.

Inventor： Mun Ki Lee ,  Byung Ki Kim ,  Jae Hyuk Park ,  Dae Gean Kim ,  Myoung No Lee

IPC: C23C16/06

CPC classification number: C23C24/04 ,  C04B35/447 ,  C04B35/505 ,  C04B35/62222 ,  C04B2235/5436 ,  C23C16/06 ,  C23C16/4404 ,  C23C16/4581 ,  H01J37/32495

Abstract: The present invention discloses the method for forming the coating having the composite coating particle size and the coating formed thereby, comprising the steps of: receiving, from a powder supply portion, a plurality of powders within a first powder particle size range, and transporting the powders using a transport gas; and forming a coating in which a plurality of first particles within a first coating particle size range and a plurality of second particles within a second coating particle size range, which is larger than the first coating particle size range, by causing the transported powders to collide with a substrate inside a process chamber at the speed of 100 to 500 m/s so as to be pulverized.

Abstract translation: 本发明公开了形成具有复合涂层粒度的涂层的方法和由其形成的涂层，包括以下步骤：从粉末供应部分接收在第一粉末粒度范围内的多个粉末，并将 使用运输气体的粉末; 并且通过使所运送的粉末发生碰撞而形成第一涂层粒度范围内的多个第一颗粒和大于第一涂层粒度范围的第二涂层粒径范围内的多个第二颗粒的​​涂层 在100〜500m / s的速度下将处理室内的基板以粉碎状态进行粉碎。

公开(公告)号：US10982331B2

公开(公告)日：2021-04-20

申请号：US15112086

申请日：2014-12-04

Applicant: IONES CO., LTD.

Inventor： Mun Ki Lee ,  Byung Ki Kim ,  Jae Hyuk Park ,  Dae Gean Kim ,  Myoung No Lee

IPC: C23C24/04 ,  C23C16/06 ,  C04B35/447 ,  C04B35/505 ,  C04B35/622 ,  C23C16/44 ,  C23C16/458 ,  H01J37/32

Abstract: The present invention relates to a method for forming a ceramic coating having improved plasma resistance and a ceramic coating formed thereby. The present invention discloses the method for forming the ceramic coating having improved plasma resistance and the ceramic coating formed thereby, comprising the steps of: receiving, from a powder supply portion, a plurality of ceramic powders having a first powder particle size range, and transporting the powders using a transport gas; and forming a ceramic coating in which a plurality of first ceramic particles within a first coating particle size range and a plurality of second ceramic particles within a second coating particle size range, which is larger than the first coating particle size range, by causing the transported ceramic powders to collide with a substrate inside a process chamber, at the speed of 100 to 500 m/s so as to be pulverized.

公开(公告)号：US10590542B2

公开(公告)日：2020-03-17

申请号：US15112079

申请日：2014-12-04

Applicant: IONES CO., LTD.

Inventor： Mun Ki Lee ,  Byung Ki Kim ,  Jae Hyuk Park ,  Dae Gean Kim ,  Myoung No Lee

IPC: C23C24/04 ,  C23C16/06 ,  C04B35/447 ,  C04B35/505 ,  C04B35/622 ,  C23C16/44 ,  C23C16/458 ,  H01J37/32

Abstract: The present invention discloses the method for forming the coating having the composite coating particle size and the coating formed thereby, comprising the steps of: receiving, from a powder supply portion, a plurality of powders within a first powder particle size range, and transporting the powders using a transport gas; and forming a coating in which a plurality of first particles within a first coating particle size range and a plurality of second particles within a second coating particle size range, which is larger than the first coating particle size range, by causing the transported powders to collide with a substrate inside a process chamber at the speed of 100 to 500 m/s so as to be pulverized.