Invention Grant
- Patent Title: Substrate treating apparatus and method for inspecting treatment liquid nozzle
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Application No.: US16157541Application Date: 2018-10-11
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Publication No.: US10985007B2Publication Date: 2021-04-20
- Inventor: Kwangsup Kim
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Chungcheongnam-do
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Chungcheongnam-do
- Agency: Carter, DeLuca & Farrell LLP
- Priority: KR10-2017-0132279 20171012
- Main IPC: H01L21/02
- IPC: H01L21/02 ; B05C5/00 ; B05C11/00 ; H01L21/67

Abstract:
Disclosed are a substrate treating apparatus and a method for inspecting a treatment liquid nozzle. The substrate treating apparatus includes a support member configured to support a substrate, a treatment liquid nozzle configured to discharge a treatment liquid to the substrate located on the support member, a light source configured to irradiate light to a point of the substrate, to which the treatment liquid is discharged, a camera configured to photograph the point of the substrate, to which the treatment liquid is discharged, and a controller configured to determine, through an image captured by the camera, whether a crown is generated when the treatment liquid collides with the substrate.
Public/Granted literature
- US20190111450A1 SUBSTRATE TREATING APPARATUS AND METHOD FOR INSPECTING TREATMENT LIQUID NOZZLE Public/Granted day:2019-04-18
Information query
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