Invention Grant
- Patent Title: Semiconductor device
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Application No.: US16503790Application Date: 2019-07-05
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Publication No.: US10985275B2Publication Date: 2021-04-20
- Inventor: Weonhong Kim , Wandon Kim , Hyeonjun Baek , Sangjin Hyun
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2018-0078866 20180706,KR10-2019-0005360 20190115
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/28 ; H01L29/06 ; H01L29/423 ; H01L29/49 ; H01L29/51 ; H01L29/66 ; H01L29/786

Abstract:
A semiconductor device includes a substrate including an active pattern, a gate electrode crossing the active pattern in a plan view, and a ferroelectric pattern interposed between the active pattern and the gate electrode. The gate electrode includes a work function metal pattern disposed on the ferroelectric pattern, and an electrode pattern filling a recess formed in an upper portion of the work function metal pattern. A top surface of a topmost portion of the ferroelectric pattern is lower than a bottom surface of the recess.
Public/Granted literature
- US20200013899A1 SEMICONDUCTOR DEVICE Public/Granted day:2020-01-09
Information query
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