Invention Grant
- Patent Title: Semiconductor memory devices
-
Application No.: US16820006Application Date: 2020-03-16
-
Publication No.: US10991699B2Publication Date: 2021-04-27
- Inventor: Hui-Jung Kim , Min Hee Cho , Bong-Soo Kim , Junsoo Kim , Satoru Yamada , Wonsok Lee , Yoosang Hwang
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Myers Bigel, P.A.
- Priority: KR10-2017-0101835 20170810
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L21/28 ; H01L29/49 ; H01L29/06

Abstract:
Semiconductor memory devices are provided. A semiconductor memory device includes an isolation layer in a first trench and a first gate electrode portion on the isolation layer. The semiconductor memory device includes a second gate electrode portion in a second trench. In some embodiments, the second gate electrode portion is wider, in a direction, than the first gate electrode portion. Moreover, in some embodiments, an upper region of the second trench is spaced apart from the first trench by a greater distance, in the direction, than a lower region of the second trench. Related methods of forming semiconductor memory devices are also provided.
Public/Granted literature
- US20200219885A1 SEMICONDUCTOR MEMORY DEVICES Public/Granted day:2020-07-09
Information query
IPC分类: