Invention Grant
- Patent Title: Image sensors
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Application No.: US16558820Application Date: 2019-09-03
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Publication No.: US10991742B2Publication Date: 2021-04-27
- Inventor: Dae-han Han , Sun-Hyun Kim , Han-seok Kim , Chung-ho Song , Gyeong-hee Lee , Hee-geun Jeong
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2018-0105316 20180904
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L21/00 ; H01L23/522

Abstract:
An image sensor includes a semiconductor substrate having a first surface and a second surface, a pixel element isolation film extending through an interior of the semiconductor substrate and defining a plurality of active pixels in the semiconductor substrate, and a dummy element isolation film extending through the interior of the semiconductor substrate and extending along at least one side of the active pixels in a plan view and defining a plurality of dummy pixels in the semiconductor substrate. The pixel element isolation film may have a first end that is substantially coplanar with the first surface and has a first width in a first direction parallel to the first surface, and the dummy element isolation film has a first end that is substantially coplanar with the first surface and has a second width that is greater than the first width of the pixel element isolation film.
Public/Granted literature
- US20200075643A1 IMAGE SENSORS Public/Granted day:2020-03-05
Information query
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