公开(公告)号：US11508771B2

公开(公告)日：2022-11-22

申请号：US17240120

申请日：2021-04-26

Applicant: Samsung Electronics Co., Ltd.

Inventor： Dae-han Han ,  Sun-hyun Kim ,  Han-seok Kim ,  Chung-ho Song ,  Gyeong-hee Lee ,  Hee-geun Jeong

IPC: H01L27/146 ,  H01L21/00 ,  H01L23/522

Abstract: An image sensor includes a semiconductor substrate having a first surface and a second surface, a pixel element isolation film extending through an interior of the semiconductor substrate and defining a plurality of active pixels in the semiconductor substrate, and a dummy element isolation film extending through the interior of the semiconductor substrate and extending along at least one side of the active pixels in a plan view and defining a plurality of dummy pixels in the semiconductor substrate. The pixel element isolation film may have a first end that is substantially coplanar with the first surface and has a first width in a first direction parallel to the first surface, and the dummy element isolation film has a first end that is substantially coplanar with the first surface and has a second width that is greater than the first width of the pixel element isolation film.

公开(公告)号：US10991742B2

公开(公告)日：2021-04-27

申请号：US16558820

申请日：2019-09-03

Applicant: Samsung Electronics Co., Ltd.

Inventor： Dae-han Han ,  Sun-Hyun Kim ,  Han-seok Kim ,  Chung-ho Song ,  Gyeong-hee Lee ,  Hee-geun Jeong

IPC: H01L27/146 ,  H01L21/00 ,  H01L23/522

Abstract: An image sensor includes a semiconductor substrate having a first surface and a second surface, a pixel element isolation film extending through an interior of the semiconductor substrate and defining a plurality of active pixels in the semiconductor substrate, and a dummy element isolation film extending through the interior of the semiconductor substrate and extending along at least one side of the active pixels in a plan view and defining a plurality of dummy pixels in the semiconductor substrate. The pixel element isolation film may have a first end that is substantially coplanar with the first surface and has a first width in a first direction parallel to the first surface, and the dummy element isolation film has a first end that is substantially coplanar with the first surface and has a second width that is greater than the first width of the pixel element isolation film.