Invention Grant
- Patent Title: Hard X-ray photoelectron spectroscopy system
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Application No.: US16506168Application Date: 2019-07-09
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Publication No.: US11002693B2Publication Date: 2021-05-11
- Inventor: Tomas Wiell , Christopher Liljenberg , Pål Palmgren
- Applicant: Scienta Omicron AB
- Applicant Address: SE Uppsala
- Assignee: Scienta Omicron AB
- Current Assignee: Scienta Omicron AB
- Current Assignee Address: SE Uppsala
- Agency: Morrison & Foerster LLP
- Main IPC: G01N23/2273
- IPC: G01N23/2273 ; H01J35/06 ; G21K1/06 ; H01J49/44 ; H01J49/06

Abstract:
The present invention relates to a hard X-ray photoelectron spectroscopy (HAXPES) system comprising an X-ray tube, an X-ray monochromator, and a sample. The X-ray tube provides a beam of photons, which via the X-ray monochromator is directed through the system so as to excite electrons from the illuminated sample. The X-ray tube is connected to a monochromator vacuum chamber in which the X-ray monochromator is configured to monochromatize and focus the beam onto the sample. The monochromator vacuum chamber is connected to an analysis vacuum chamber, the illuminated sample being mounted inside the analysis vacuum chamber and the analysis vacuum chamber being connected to an electron energy analyser. The electron energy analyser is mounted onto the analysis vacuum chamber. Further, the beam of photons provided from the X-ray tube is divergent and has an energy above 6 keV. The X-ray monochromator also comprises a curved optical element arranged to both monochromatize and focus the diverging beam of photons.
Public/Granted literature
- US20210010960A1 HARD X-RAY PHOTOELECTRON SPECTROSCOPY SYSTEM Public/Granted day:2021-01-14
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