Invention Grant
- Patent Title: Core configuration with alternating posts for in-situ electromagnetic induction monitoring system
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Application No.: US15727297Application Date: 2017-10-06
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Publication No.: US11004708B2Publication Date: 2021-05-11
- Inventor: Hassan G. Iravani , Boguslaw A. Swedek , Tzu-Yu Liu , Kun Xu , Shih-Haur Shen
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/304 ; H01L21/66 ; B24B49/10 ; G01B7/06 ; B24B49/02 ; B24B37/013 ; G01N27/90
Abstract:
An apparatus for chemical mechanical polishing includes a platen having a surface to support a polishing pad and an electromagnetic induction monitoring system to generate a magnetic field to monitor a substrate being polished by the polishing pad. The electromagnetic induction monitoring system includes a core positioned at least partially in the platen and a coil wound around a portion of the core. The core includes a back portion and a multiplicity of posts extending from the back portion in a first direction normal to the surface of the platen. The core and coil are configured such that the multiplicity of posts include a first plurality of posts to provide a first magnetic polarity and a second plurality of posts to provide an opposite second magnetic polarity, and the first plurality of posts and the second plurality of posts are arranged in an alternating pattern.
Public/Granted literature
- US20180122667A1 CORE CONFIGURATION WITH ALTERNATING POSTS FOR IN-SITU ELECTROMAGNETIC INDUCTION MONITORING SYSTEM Public/Granted day:2018-05-03
Information query
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