Invention Grant
- Patent Title: Vacuum pump
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Application No.: US15115094Application Date: 2015-01-08
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Publication No.: US11009040B2Publication Date: 2021-05-18
- Inventor: Manabu Nonaka , Takashi Kabasawa
- Applicant: Edwards Japan Limited
- Applicant Address: JP Yachiyo
- Assignee: Edwards Japan Limited
- Current Assignee: Edwards Japan Limited
- Current Assignee Address: JP Yachiyo
- Agency: Westman, Champlin & Koehler, P.A.
- Agent Theodore M. Magee
- Priority: JPJP2014-019654 20140204
- International Application: PCT/JP2015/050316 WO 20150108
- International Announcement: WO2015/118897 WO 20150813
- Main IPC: F04D29/54
- IPC: F04D29/54 ; F04D19/04 ; F04D29/52 ; F04D29/58

Abstract:
To provide a vacuum pump capable of heating only a flow channel extending from the vicinity of an exit of a thread groove exhaust flow channel toward an outlet port and prevents the accumulation of a product that is caused by a decrease in the temperature of process gas near the exit of the thread groove exhaust flow channel and the flow channel. A vacuum pump has a thread groove exhaust portion that has thread groove exhaust flow channels at least in respective parts of portions on inner and outer circumferential sides of a rotor (rotating body), a casing enclosing the thread groove exhaust portion, an outlet port for exhausting gas compressed by the thread groove exhaust portion to the outside of the casing, and a partition wall that covers a flow channel extending from the exits of the thread groove exhaust flow channels toward the outlet port.
Public/Granted literature
- US20170002832A1 VACUUM PUMP Public/Granted day:2017-01-05
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