Invention Grant
- Patent Title: Systems and methods for performing edge ring characterization
-
Application No.: US15403786Application Date: 2017-01-11
-
Publication No.: US11011353B2Publication Date: 2021-05-18
- Inventor: Marcus Musselman , Andrew D. Bailey, III , Jon McChesney
- Applicant: LAM RESEARCH CORPORATION
- Applicant Address: US CA Fremont
- Assignee: LAM RESEARCH CORPORATION
- Current Assignee: LAM RESEARCH CORPORATION
- Current Assignee Address: US CA Fremont
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/687 ; H01L21/68 ; H01L21/67
Abstract:
A substrate support in a substrate processing system includes an inner portion arranged to support a substrate, an edge ring surrounding the inner portion, and a controller. The controller at least one of raises the edge ring to selectively cause the edge ring to engage the substrate and lowers the inner portion to selectively cause the edge ring to engage the substrate. The controller determines when the edge ring engages the substrate and calculates at least one characteristic of the substrate processing system based on the determination of when the edge ring engages the substrate.
Public/Granted literature
- US20170287682A1 SYSTEMS AND METHODS FOR PERFORMING EDGE RING CHARACTERIZATION Public/Granted day:2017-10-05
Information query
