Invention Grant
- Patent Title: Memory device and method for fabricating the same
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Application No.: US16543688Application Date: 2019-08-19
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Publication No.: US11018154B2Publication Date: 2021-05-25
- Inventor: Chun-Chang Lu , Wen-Jer Tsai , Guan-Wei Wu , Yao-Wen Chang
- Applicant: MACRONIX INTERNATIONAL CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L29/36 ; H01L29/10 ; H01L23/528 ; H01L21/265 ; H01L21/02 ; H01L21/28 ; H01L29/51

Abstract:
A memory device includes a conductive strip stack structure having conductive strips and insulating layers stacked in a staggered manner and a channel opening passing through the conductive strips and the insulating layer; a memory layer disposed in the channel opening and overlying the conductive strips; a channel layer overlying the memory layer; a semiconductor pad extending upwards from a bottom of the channel opening beyond an upper surface of a bottom conductive strip, in contact with the channel layer, and electrically isolated from the conductive strips; wherein the channel layer includes a first portion having a first doping concentration and a second portion having a second doping concentration disposed on the first portion.
Public/Granted literature
- US20210057432A1 MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2021-02-25
Information query
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